創新在地循環式空氣循環系統應用於工業潔淨室之研究

The study of an innovative locally balanced air circulation system in industrial cleanrooms

林迪(Ti Lin)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/機電科技研究所/博士(2011年)

摘要

傳統牆回風的空氣循環系統包含了天花板送風以及牆壁回風格閘，被廣泛的運用在ISO class 6~8的非單一方向流之潔淨室中。在牆回風的潔淨室中，空氣循環循環路徑容易遭受生產線或是製程機台的阻礙，尤其是在經常需要進行生產線更動以及變更機台擺設的工業潔淨室更是需要注意。在本研究中提出一個新型的風機乾盤管機組(FDCU)，其包含了天花板送風以及天花板回風的空氣循環路徑，並且將它裝置在一個全尺寸真實的潔淨室中，對其進行性能的實驗量測、分析，並且與傳統的牆回風系統進行性能比較。在本研究中，潔淨室空氣循環次數對0.1μm直徑微粒移除性能所造成的影響進行了實驗分析。對於0.1μm直徑微粒的移除性能，FDCU回風的設計較牆回風系統設計提升了49%。且就一固定的潔淨室來說，其潔淨度受空氣循環次數的影響非常大。
在本研究中，對製程機台於潔淨室中排放廢熱對不同潔淨室空氣循環設計的氣流影響進行了分析。並且對FDCU回風系統與傳統的牆回風系統進行氣流形態與溫度分佈之間的比較。結果得到FDCU回風系統對於處理高發熱源機台較牆回風系統可以提供較平順的流場形式和較佳的溫度分佈。

關鍵字

風機乾盤管 ； 潔淨室 ； 非單一方向流 ； 微粒 ； 通風 ； 節能

並列摘要

A wall-return ventilation system, containing ceiling-supply and wall-return air grilles, is traditionally applied in non-unidirectional airflow cleanrooms with ISO cleanliness level of 6 to 8. In such a wall-return cleanroom, the pathways of return airflow toward the wall-return grilles may be affected by locations and layouts of the production lines and tool equipment. Especially, the need for re-relocating production lines and rearrangement of tool equipment in the industrial cleanrooms should be considered. This study proposed a fan dry coil unit (FDCU) return system, containing ceiling supply and ceiling-return air grilles, and conducted experimental works in a full-scale cleanroom to investigate the performance of the innovative and traditional ventilation systems. The influences of air change rates and supply air plenum pressures on the removal of 0.1 μm particles were examined in the experiment. The FDCU-return ventilation arrangement may provide viable solutions to achieve effective contamination control. The results show that the innovative FDCU-return system can effectively eliminate at least 49% of 0.1 μm particles from the cleanrooms more than the conventional wall return system. Moreover, the outcomes from this study suggested that particle removal rates for the given cleanrooms were significantly affected by air change rates. This study further investigated the effect of the heat dissipation from the tools on airflow characteristics and temperature distribution in the FDCU-return and wall-return airflow type cleanrooms. Comparisons of air flow pattern and temperature distribution between the FDCU-return air system and the conventional wall-return air system are presented. It is concluded that the FDCU-return air system can significantly provide better air motion characteristics and temperature distributions in high heat source cases in comparison with those of the wall-return air system.

並列關鍵字

FDCU ； FFU ； Cleanroom ； Non-unidirectional airflow ； Particle ； Ventilation ； Energy saving

參考文獻

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