應用系統鑑別法分析壓力感測器之動態特性

對液壓系統研究其動態特性是十分重要的，因為現今液壓系統在動態環境條件下使用比靜態環境還普遍。壓力感測器大都用在複雜的動態工作環境下，然而在高精密度之系統中，常見的問題如反應速度太慢、動作不順暢、振動、疲勞等，而導致感測器系統性能及壽命降低，原因是未掌握到感測器的動態特性所造成。本文目的只要是藉著先前所自製之方波產生器和系統鑑別法來測試及分析液壓系統中壓力感測器之動態特性；壓力方波產生器其原理是利用旋轉軸與旋轉軸環之差分法的設計方式來作為壓力方波之切換開關，並可達到高頻的切換作用，且用以取代傳統的方向控制閥。將壓力方波產生器所產生之壓力方波輸入液壓系統中，並以高靈度之壓電式壓力感測器為量測訊號之基準分別再對壓電式及壓阻式壓力感測器做同步測試，最後經由系統鑑別中的各種鑑別法，如ARX、ARMAX以及OE鑑別法等，找出對壓力感測器模式最準確建模的鑑別法，並且由建模出的模式可得到各壓力感測器之轉移函數、共振頻率及共振峰值等動態性能指標。

關鍵字

壓力方波；系統鑑別；壓力感測器

並列摘要

While most studies on hydraulic systems focus mainly on their static characteristic, a good understanding of their dynamic characteristic is of equally important. Pressure sensors are used in complex dynamic working environment. There are some problems in high precise system, for example, slower response speed, lacking of smoothly working, vibration and fatigue. For the reason of not catching dynamic characteristic of sensors, the performance and life of sensors will be decreased. Using a self-developed square pressure wave generator(SPWG),this study explores the dynamic characteristic of pressure sensors in hydraulic systems using system identifications analysis. As a replacement of the traditional directional control valve, the developed SPWG can achieve high-frequency switching by the difference method between the revolving shaft and fixed ring. The square pressure waves generated serve as inputs into the hydraulic system. With the high-sensitivity piezoelectric pressure sensor as the reference sensor, tests are conducted concurrently using a piezoelectric pressure sensor and piezoresistive pressure sensor .Finding out the most precise one of the pressure sensors mode is via system identification of various methods, for example, identification method of ARX、ARMAX and OE. The modeled mode reveals dynamic characteristics performance index including transfer function, resonate frequency and resonate magnitude of the pressure sensors.

並列關鍵字

Pressure square ； System identification ； Pressure sensor

參考文獻

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應用系統鑑別法分析壓力感測器之動態特性

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