微波反應活性碳循環床處理半導體業排放異丙醇與丙酮廢氣之研究

Treatment of IPA and Acetone Exhausted from Semiconductor Industry by Activated Carbon in a Circulating Fluidized-bed with Microwave system

黃楷茗(Kai-Ming Huang)

指導教授 ： 林文印

國立臺北科技大學/工程學院/環境規劃與管理研究所/碩士(2007年)

https://doi.org/10.6841/NTUT.2007.00370

摘要

隨著半導體業在台灣迅速成長，其製程中需使用大量的有機溶劑，這些污染物不但對工作人員的健康造成危害，且逸散至大氣中造成污染。其中異丙醇與丙酮為主要排放之揮發性有機氣體。
本研究使用活性碳吸附揮發性有機物，以微波技術再生活性碳，乃因微波具有較高之能源使用效率及較高穿透性，不僅可提高吸附質之脫附效率，亦可節省大量能源之損耗。本系統可藉由活性碳克數、微波功率、及系統反應之溫度，可得到不同的去除效率。
研究結果顯示，活性碳吸附實驗中可知活性碳吸附異丙醇比丙酮之效果較好。當處理微波功率越高，異丙醇與丙酮之去除效率會有增加之趨勢，產出之二氧化碳也有增加之趨勢。而使用活性碳之克數越少，去除異丙醇與丙酮之去除效率隨之增加，產出之二氧化碳也有增加之趨勢，造成上述之原因可能受溫度影響，處理效率會受溫度增加而增加。最佳去除效率之操作條件為80g活性碳使用250W之微波功率可使異丙醇與丙酮分別有99.26%、98.66%之去除效率。以GC/MS分析經微波處理異丙醇與丙酮之廢氣，並未發現其它副產物之產生。微波處理異丙醇與丙酮後，系統之相對濕度皆會增加，顯示有水分產生。
由SEM之結果可得，微波反應之功率越高，活性碳孔隙與孔洞有增加之趨勢，且活性碳表面有些微白色區塊，可能是異丙醇與丙酮停留在活性碳表面上無法被完全脫附。經微波處理後的比表面積，隨微波功率之增加，活性碳表面積有增加之趨勢，其中異丙醇之比表面積比丙酮大，可能丙酮比異丙醇停留在活性碳的量較多，造成丙酮留在活性碳內無法被排出，因此比表面積會比較小。

關鍵字

半導體業 ； 揮發性有機物 ； 流體化床 ； 活性碳 ； 微波

並列摘要

The semiconductor industry in Taiwan, while sustaining rapid development in recent years, demands a large amount of organic solvents which are pollutants harmful not only to the industry’s workers but also to the environment. Two of the organic solvents generated most frequently by the semiconductor industry are IPA and acetone.
This study uses activated carbon (AC) to adsorb volatile organic compound (VOC) and utilizes microwave heating technology to recycle AC because of microwave’s high energy utilization and strong penetration ability. This technology can enhance desorption efficiency of the media while saving great amount of energy. This study investigates the effect on removal efficiency of microwave power, activated carbon weight and the temperature factor.
Results have shown that AC reports a better efficiency in adsorbing isopropyal alcohol (IPA) than in absorbing acetone. Both higher microwave power and lesser AC weight lead to better IPA and acetone removal efficiency and greater CO2 concentration. This is because temperature effects the removal efficiency and CO2 concentration. The optimal operating parameters are 80g AC under 250W microwave power, generating average IPA and acetone removal efficiency of 99.26% and 98.66% respectively. GC/MS is used to analyze exhausted IPA and acetone processed by microwave and finds no extra byproduct. Processing IPA and acetone by microwave results in an increase in the system’s relative humidity (RH), which in turn indicates the presence of water.
Crevices and holes in AC increase with higher microwave power. Several white blocks on AC surface are detected; these may be the residues of IPA and acetone not completely desorbed. Moreover, AC treated with higher microwave power has a greater specific surface area, and AC absorbing IPA tends to show a greater specific surface area than AC absorbing acetone. One possible explanation may be that there are more residues of acetone in AC than those of IPA, and the inability of AC to remove these acetone residues reduces the specific surface area.

並列關鍵字

Semiconductor ； volatile organic compound (VOC) ； fluidized-bed ； activated carbon ； microwave

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