- 學位論文
整合雙CCD自動光學檢測系統與XXY平台於光罩對位系統的設計
Design of a Mask Alignment System Using an AOI with two CCDs and a XXY Stage
摘要
本研究的目的是發展應用自動光學檢測(AOI)於光罩自動對位之技術。藉由AOI 與影像辨識的技術來建構一組自動化對位系統，取代人工肉眼對位。研究重點在於上下試片標記圖形之辨識處理以及對位公式的計算，將影像視覺技術與XXY平台兩相結合來開發一組可用於XXY 平台上的影像伺服自動化控制系統。 自動光學影像對位系統主要是針對圓形標靶進行自動光學影像檢測，而本研究也完成了實際的上下試片對位，上試片為完整圓或部分圓皆可進行對位，而本研究針對上試片為部分圓時做探討，因上試片為部分圓時採用霍夫圓轉換找圓心，如果使用與完整圓相同的方法(重心法)找圓心會有誤差產生。透過程式撰寫、PLC可程式邏輯控制器與鏡頭、以及GIGAE CCD 多方整合成三軸定位平台系統與影像辨識系統二部份，再搭配對位公式運算，來達成精密的影像伺服定位，最後在使用二次對位來提升平台對位的精準度。
並列摘要
In this study, an automatic optical inspection (AOI) guidance system is proposed. A co-plane XXY stage is integrated with two GIGA-E CCDs with lens, a PLC and a PC to perform automatic mask-alignment tasks. To replace manual operations for mask alignment tasks, an AOI system is studied to control the XXY three-axis positioning stage perform positioning tasks based on a vision servo system. The vision servo system is developed to provide the position information according to the image recognition of the circular marks and the PLC system is used to produce the positioning command for the XXY stage via Ethernet. To obtain the better precision, two methods including the vector transformation method and the slope relation method are proposed to correct the shift positioning error due to the rotation movement.
參考文獻
延伸閱讀
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