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  • 學位論文

紫外光可交聯之發光光阻性質探討

Properties of UV Light Crosslinkable Photo-Resistant Organic Luminescent Material

指導教授 : 張淑美
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摘要


本研究利用鈴木偶合法將雙苯化合物與一具環氧丙基衍生物進行偶合,可得在UV光照射下發出藍光的螢光光阻化合物。將此螢光物質利用溶劑溶解,並旋轉塗佈在基材上形成薄膜,側鏈基上的環氧丙基,經加入適當光起始劑後,配合光罩將圖案轉換到薄膜表面進行曝光,由於曝光區的光化學反應,與非曝光區產生溶解度之差異,經由溶劑顯影則可得光學圖案化效果。 產物的鑑定由NMR、IR、Mass證明。利用紫外光/可見光吸收光譜儀偵測薄膜的螢光吸收光譜,光致發光光譜儀量測其PL

並列摘要


This research is the synthesis of photo-resistant organic luminescent material. The blue photo-resistant luminescent compound is consisted of phenylenes and oxetane function group synthesized via Suzuki coupling. These compounds with oxetane side groups which are soluble in proper solvent are spin-coated on the substrate to form thin films. It can be converted into patterned insoluble polymer films after UV light irradiation with proper photo-initiator adding and patterned mask attached. The solubility of irradiated films is different from non-irradiated part. It successfully produced a patterned picture. Those compounds were characterized with NMR, IR, Mass spectroscopy. The optic properties of the thin film were measured by UV-Vis spectroscopy and PL spectrometer.

並列關鍵字

Oxetane Photo-crosslinkable

參考文獻


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