- 學位論文
液晶面板製程濺鍍設備電力諧波及三相不平衡問題之診斷及改善研究
Diagnostic and Improvement for Harmonics and 3 Phase Unbalance Problem on Sputter Equipment of TFT-LCD
摘要
面板設備製造商在設計液晶面板廠濺鍍機時，往往只聚焦於製程技術的改良，而忽略電力諧波及三相不平衡對設備的影響，使得設備有時受制於諧波與三相不平衡的問題無法滿載運轉。本文以MathCAD建立傅立葉分析諧波的數學模型，並利用其數學模型分析液晶面板製造廠濺鍍設備造成的諧波電壓及電流，並考慮三相不平衡時之特性。目前台灣大型液晶面板製造商，大多安裝大尺寸的先進面板設備，在安裝大尺寸的濺鍍機設備時常遇到類似的電力品質問題，造成設備供應商及廠家很大的損失。有必要了解其原因並加以解決，本研究經現場量測證實諧波與三相不平衡頗為嚴重，故針對此問題加以分析。 首先利用傅立葉級數的數學模型分析諧波成份及電源三相不平衡的程度。然後針對配電系統的要求及設備設計的規格，依據現場資料研判諧波及三相不平衡是否需要改善，由於目前台灣對低電壓系統尚無諧波或三相不平衡的規範，本人僅能針對設備設計規格要求進行改善。當有必要進行改善時，本文中提出二階阻尼諧波濾波器改善，除考慮諧波階次外尚須配合濺鍍設備空間限制，故本文選擇安裝二階阻尼諧波濾波器，至於三相不平衡的問題主要還是現場要做配線換位工程。 最後本文提出兩個整頓及改善實例，經由兩個實例的驗證可證實本文所提出的分析方法、二階阻尼諧波濾波器及三相換位確實可改善諧波及三相不平衡的問題達到設備正常運轉要求。
並列摘要
When flat panel equipment vendor develop TFT-LCD sputtering equipment, their focus is on how to improve process technology. It is easy to ignore the effect of power quality. The equipment might not operate normally due to the effect. In order to judge if we suffer from power quality problem, we build a Fourier series mathematical model by Mathcad. We could analyze the harmonic voltage and current caused by the sputter machine of TFT-LCD via the mathematic model. Most of TFT-LCD manufacture installed big scale sputtering equipment. And they suffer from similar power quality problem during installation. Those could cost a lot for both equipment vendor and TFT-LCD manufacture. It is necessary to deeply understand the problem and improve the level of the effect. We proved that the harmonic and 3 phase unbalance are critical problem by measuring the field data. We should analysis those harmonic and 3 phase unbalance field data. We could analyze the harmonic contents and the 3 phase unbalance by using the mathematical model of this article. We could judge if we improve harmonic and 3 phase unbalance situation from field data according to the requirement of power system and production specification. There is no compliance for low voltage power system in Taiwan. The author could only improve the condition upon the production equipment specification. When it is necessary to improve, we use 2nd order harmonic damping filter as solution for Sputtering equipment. In addition to consider harmonics improvement, the limit space is also a big challenge. The 2nd order harmonic damping filter could meet both requirements. With regard to 3 phase unbalance problem, it is necessary to do transposition in the field. Finally we collected 2 practical cases in this thesis. We proved that the analysis method that we mentioned in this article is useful via those practical cases. And we verified if we solve the problem by installing harmonic damping filter and transposition power cable via the same mathematical model.