氧基矽烷液製作氧化錫氣體感測片性質探討

本文先以化學析出(CP)法及溶膠-凝膠(SG)法製作氧化錫粉末，再以香油腦研磨攪拌成膏狀物壓印來製作氣體感測片，顯示溶膠凝膠(SG)所製得之氧化錫感測片對乙醇敏感性質優於化學析出法(CP)所製得之氧化錫感測片，但單純之溶膠凝膠(SG)所製得之氧化錫感測片確易發生龜裂現象，另試以氧基矽烷類材料與溶膠凝膠SG法製作之氧化錫粉末，用化學交鏈結工法製作氣體感測片，並以乙醇進行反應性質探討，本研究所選擇之氧基矽烷類材料有二種，一為四甲氧基矽烷液，一為三甲氧基矽烷液，溶膠凝膠所製之氧化錫粉末，用氧基矽烷液以化學交鏈結法固定後，顯示以氧基矽烷液所製作之感測片結構嚴密與載台粘著性良好,優於純溶膠凝膠法所製之氣體感測片。氧基矽烷類材料以交鏈結工法將溶膠凝膠(SG)氧化錫粉末，固定於矽酸硼玻璃片上製成感測片後，最適宜量測之溫度為250℃至300℃,可測量乙醇濃度範圍為26mg/L至131mg/L.

關鍵字

氧基矽烷；氧化錫；氣體感測片；乙醇

並列摘要

In this study, the tin oxide particles were prepared by chemical preciption or by sol-gel process, then the gas detector films were fabricated by adding terpenol stamp pressing, it show the properties of gas detector made by sol-gel process better than chemical preciption process, but the gas detector made by sol-gel process was more easily found crack on appearance. So we try used oxysilane liquid material to synthesized gas detector, there are two kind oxysilane liquid ,one is tetramethoxysilane, the other is methyltrimethoxysilane, This gas detector are tight structure and good adhesion, we found that the best operation temperature is 250℃ to 300℃. The measurable ethanol concentration is from 26 mg/ L to 131 mg/ L at this temperature.

並列關鍵字

oxysilane ； Tin oxide ； gas detector ； ethanol

參考文獻

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氧基矽烷液製作氧化錫氣體感測片性質探討

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