Mirau顯微干涉儀在厚度及折射率量測之應用

隨著半導體、微機電等製程技術提升，元件尺寸縮小化，對於製程品質也越來越嚴格，因此需要以非破壞性及非接觸性進行檢測。本文以Nikon Eclipse 50i顯微鏡作為實驗基台，搭配Mirau干涉式物鏡組發展一套結合具顯微鏡放大影像功能及干涉技術的顯微干涉儀，配合相移術或垂直掃描術量測方法，運用於不同的量測應用。以相移術量測方法，來取得測試光與參考光的相位差，進而可求出待測體物的高度值，可應用於量測待測物之平整度及重建三維表面輪廓結構。垂直掃描術量測方法，以白光同調長度短的特性，再結合微調平台之螺旋測微器及驅動PZT推動Mirau物鏡組，提升縱向深度量測範圍，可量測相移術所限制的不連續表面，本文應用於量測透明待測物的厚度及折射率。本文所測量之實驗數據將與HP5529A雙頻雷射量測系統量測數據作比對，以證實此實驗方式之理論及架設的可行性和正確性。

關鍵字

顯微干涉儀；相移術；垂直掃描術

並列摘要

With the improvement of fabrication in the semiconductor and MEMS (Micro-Electro-Mechanical Systems) field and the miniaturization of the device size, the requirement for the processing quality is stricter. Accordingly, it is necessary to conduct non-destructive and untouchable inspection. The thesis does the research that utilize the microscope Nikon Eclipse 50i as its experimental foundation equipped with the Mirau interference objective set to develop interferometric microscope which has magnifying images function and interference technique. Combined with the phase-shifting measuring method or vertical scanning measuring method, the interferometric microscope can be employed for various applications about measurement. Phase-shifting measuring method can detect the phase shift of test light and reference light and then figures about the height of tested object can be obtained. It can be used to measure the Roughness of tested object and can rebuild the 3D surface structure of its contour. Joined the Fine tune platform and driving PZT to propel the Mirau objective set, vertical scanning measuring method which utilize the character of short coherence length white light source can increase the measuring range of vertical depth and measure discontinuous area correctly beyond the limitation of phase shift. The method is applied in this experiment to measure the thickness of the transparent object and its refractive index. the measured statistic in the experiment is compared with the statistic measured by HP5529A dual-frequency laser interferometer to prove the feasibility and correctness on the theory and setup of the experiment method.

並列關鍵字

interferometric microscope ； phase-shifting method ； vertical scanning method

參考文獻

[17]J.C. Wyant, “White Light Interferometry,” Optical Sciences Center. University of Arizona, Tucson. AZ 85721.

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Mirau顯微干涉儀在厚度及折射率量測之應用

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