Surgical smoke, tissue sticking, and thermal injury are major concerns during electrosurgery. The Cu-DLC-electrodes generate a less amount of sticking tissues and adhesive blood cells. Thermography revealed the surgical temperature in liver tissue from the Cu-DLC-electrode was significantly lower than the SS-electrode. Moreover, Cu-DLC-electrodes caused a relatively smaller total injury area, lateral thermal injury area, fibrotic tissue area, and a faster remodeling process than the SS-electrodes. Western blot analysis showed that rats treated with Cu-DLC-electrode expressed lower levels of NF-κB, caspase-3, and MMP-9 than SS-electrode. This study reveals that the plating of Cu-DLC film on electrode improves the performance of electrosurgical unit.