運用原子力顯微鏡量測多壁奈米碳管的楊氏係數

Determination of Young's Modulus of a MWCNT Using Atomic Force Microscopy

張家豪(Chia-Hao Chang)

指導教授 ： 余念一

元智大學/工程學院/機械工程學系/碩士(2006年)

摘要

本研究使用原子力顯微鏡測量多壁奈米碳管的楊氏係數。將奈米碳管鋪在晶圓的溝槽上形成奈米尺寸的樑，用原子力顯微鏡掃描奈米樑，得到樑之跨度以及直徑等尺寸。接著用原子力顯微鏡的探針在奈米樑的中點施加一集中力，並且測量奈米樑受力點的變形量，最後用基本樑理論推算奈米碳管的楊氏係數。所求得的多壁奈米碳管楊氏係數與已發表文獻所報導的數據吻合。

關鍵字

奈米碳管 ； 原子力顯微鏡 ； 楊氏係數

並列摘要

Young’s modulus of multi-walled carbon nanotubes (MWCNTs) is measured by using an atomic force microscope. Clamped or simply supported carbon nanotube (CNT) beams at the nano scale are made. A concentrated load provided by the tip of an atomic force microscope is exerted on the middle of the nanobeam. By measuring the deflection of the nanobeam, one can determine the Young modulus of a MWCNT. A model based on elementary beam theory is developed to estimate the Young modulus of a MWCNT. The Young modulus obtained in the present work agrees well with the existing works.

並列關鍵字

carbon nanotube ； atomic force microscope ； Young''s modulus

參考文獻

Advantage Scientific Inc. (2004), private communication.

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Cheung, C. L., Hafner, J. H., and Lieber, C. M. (2000a), “Carbon nanotube atomic force microscopy tips: direct growth by chemical vapor deposition and application to high-resolution imaging,” Chemistry & Biophysics, 97, 8, pp. 3809 – 3813.