紅光無機記錄型光碟儲存媒體之研究

A study on inorganic materials as the recording media of DVD-R disc with red Laser

林瑞國(Ruel Guo Lin)

指導教授 ： 劉 宗 平 ； 鄭 尊 仁

元智大學/工程學院/電機工程學系/碩士(2004年)

摘要

在DVD光碟記錄媒體中，僅寫一次型光碟片通常選擇有機染料作為記錄層的材料。由於它對可吸收光波長的範圍較金屬為窄，以及在生產製造的過程中，易造成環境污染的問題，因而尋找替代的記錄媒質一直是專業工程師努力的目標之一。在此研究中，選擇無機型的氧化鉻薄膜來取代有機染料，作為以紅光讀寫僅寫一次型碟片之記錄層材料。
在本文中，利用反應性磁控濺鍍的方法來鍍製氧化鉻薄膜，探討這種薄膜在不同氧氣流量條件下，膜在初鍍與退火後狀態下的折射率、消光係數、反射率、透射率以及吸收率等光學性質。此外，尚針對薄膜的表面形貌以及薄膜的熱學性質進行研究和分析。最後，經由動態測試的過程，來分析資料寫入膜層的特性。
經由光譜分析的結果顯示，氧化鉻薄膜的光學對比度可高達68.6%，根據動態測試的數據發現，四層薄膜結構的eye pattern比三層的膜結構清楚。如欲獲得更好寫錄特性，那麼我們就需要大量的樣品分析資料來調整膜層的結構。

關鍵字

氧化鉻 ； 反應性濺鍍 ； 僅寫一次型光碟片

並列摘要

For DVD format storage media, organic dyes are generally used as the recording material for write-once only optical disc. However, the optical absorption of organic dyes is limited within a narrow wavelength range, and the environmental pollution caused by fabrication of organic dyes is an another considerable issue. In this thesis, we investigate the feasibility of inorganic materials as the write-once recording media for red laser. Thus, the CrOx thin films are considered for substituting the organic dyes recording layer of in a DVD-R disk.
In this study, the CrOx thin films were deposited by the method of reactive sputtering process. The composition of the film material was varied through controlling flow rate of the oxygen. We have carried out a series of measurements on the optical constants of the film material, such as refractive index, extinction coefficient, reflectance, absorptance, and transmittance, etc., to study the optical properties of CrOx thin film. Meanwhile, we also analyzed the microstructure on its surface, and the thermal properties of the deposited films as deposited and annealed. Finally, the recording marks writen in the disk were analyzed by the dynamic tester.
The results have shown that the optical contrast of the CrOx thin film was more than 68.6%. The dynamic test shows that eye pattern of the four-layer film is more clear than that of the three-layer film. In order to obtain better performance, we need enormous information of samples to adjust the film structure.

並列關鍵字

CrOx ； reactive sputtering ； DVD-R