硬碟機碟片表面型態的磨潤研究

The Study of Tribology Performance for Hard-Disk Surface Topography

簡培倫(Pei-Lun Chien)

指導教授 ： 徐澤志

元智大學/工程學院/機械工程學系/碩士(2004年)

摘要

為了增加硬碟機的磁讀取密度，磁頭的飛行高度越來越低，磁頭與碟片間的磨潤行為顯得格外重要。因此本文將探討碟片表面的波形起伏(Waviness)對於磁讀取的影響，分析出何種波形起伏的碟片表面，能有效減少磁頭與磁碟間的摩擦力並增進磁頭的飛行能力，進而增加硬碟機的磁讀取密度及壽命。
本文利用改變鋁基板製程中化學機械拋光(Chemical Mechanical Polishing, CMP)製程的移除量來製造出不同的碟片表面，並利用光學表面分析儀(Optical Surface Analyzer, OSA)來量測碟片表面的波形起伏，進而來探討拋光移除量對於為碟片表面型態的影響，並將不同的碟片表面作各種不同的實驗。
於實驗中發現較大的拋光移除量可以使碟片表面波形起伏高度較小，在粗拋製程中因使用的磨粒顆粒較大，所以影響的波形起伏其波長較長，而細拋製程中因使用的磨粒顆粒較小，所以影響的波形起伏其波長較短，且當碟片表面波形起伏高度較小時，在各種碟片磨潤實驗中均有較佳的表現。利用此研究分析出何種的碟片表面型態對與磁讀取密度以及碟片壽命是有幫助的，藉此成為碟片設計及製造時的另一個要素。

關鍵字

化學機械拋光 ； 波形起伏 ； 光學表面分析儀

並列摘要

In order to increase recording density of hard disk drive, the flying height of slider must be continual reduce. In the mean time, the tribology performance of head-disk interface (HDI) is more rigorous；however the disk surface topography is a key point to improve increase tribology performance for a HDI. The disk surface topography can be roughly divided into two regions: roughness and waviness, however the disk roughness have been widely studied by experiments and simulation models.
In this study, we change the material remove amount of Ni-P/Al substrate in the chemical mechanical polishing process (CMP), and then we can get different surface topography of disk. We use an optical surface analyzer (model number: OSA5100) to measure waviness of disk surface.
After measured waviness of disk surface, we can discriminate four different characteristic of waviness for disk. We used 30% padded slider to perform tribology tests on the disk. In this study, we will analysis what characteristic of the disk waviness can improve the tribology performance of HDI, and expect this study can be extended into future high recording density of hard disk drive.

並列關鍵字

Chemical Mechanical Polishing ； Waviness ； Optical Surface Analyzer

參考文獻

1. J. Robertson, “Requirements of Ultrathin Carbon Coatings forMagnetic Storage Technology,” Tribology international, vol. 36, pp. 405-415, 2003.

2. Jing Gui, “Tribology Challenges for Head-Disk Interface Towards 1 Tb/in2,” IEEE Trans. Magn., vol. 39 , pp. 716-721, 2003.

5. Takeshi Watanabe and David B. Bogy, “A Study of the Lubricant Displacement under a Flying Head Slider Caused by Slider-Disk Interaction,” IEEE Trans. Magn., vol. 39, no. 5, pp. 2477-2479, 2003.

7. Q. Zhao, Z. Zhao, S. Lee, E. Kazazic, M. Embree, T. Lam and S. Chang, “Quantitative Study of Lubricant Puddling at the Head/Disk Interface,” Microsystem Technologies, pp. 297-303, 2002.

8. Shahid A. Pirzada, Jia J. Liu, Z. F. Li, Janice Liu, Dong Won Park and Chao-Yuan Chen, “Functionalized Ion-Beam Carbon for Magnetic Disks,” IEEE Trans. Magn., vol.38, no. 5, pp. 2117-2119, 2002.