直徑控制對長晶爐晶體成長之研究與探討

THE DIAMETER CONTROL AT CRYSTAL GROWTH

朱保華(Pao-Hua Chu)

指導教授 ： 吳昌暉

元智大學/工程學院/機械工程學系/碩士(2004年)

摘要

本篇論文主要是針對藍寶石長晶爐的直徑控制做研究，以MATLAB做程式模擬、SIMULINK來做動態模擬，以實驗機台所能調整的參數而建構出模擬程式並於過程中得到主電腦控制器（ADC）之PID值與功率控制器之PID值的調整方法、功率輸出極限值(Slew Rate)以及LOADCELL取樣數(Smoothing Filter)對整個系統的影響。結果得到越接近輸出端者其反映時間需要越快，這樣整各系統的整體效應才會趨向穩定。

關鍵字

直徑控制 ； 晶體成長 ； PID ； 藍寶石

並列摘要

By using the Matlab and Simulink software, this work numerically simulates the dynamic situation of Sapphire crystal growth. The results of the simulation are then compared to the real diameter of grown record and refer to fine-tune the parameters of crystal growth, internationally.
The parameters of sapphire crystal growth include the slew rate, the PID of automatic diameter controller, the OID of power controller, smoothing filter, etc. As the slew rate increases, the diameters of the growing crystal become stable. The diameter variation, with respect to the crystal length, even turns into better after the fine-turn of the PID and the smoothing filter parameters.

並列關鍵字

Diameter Control ； Crystal Growth ； PID

參考文獻

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