微溫度感測器及微加熱器應用於微重組器之研究

Application of Micro Temperature Sensor and Micro Heater in a Micro Reformer

吳錦華(Chin-Hua Wu)

指導教授 ： 李其源

元智大學/工程學院/機械工程學系/碩士(2007年)

https://doi.org/10.6838/YZU.2007.00098

摘要

隨著微型燃料電池之發展，製備氫的微重組器之重要性也逐漸增加。但是微重組器仍然有一些主要問題需要克服，包含了尺寸微小化、CO含量的降低及結合微燃料電池的可能性等。因此在本研究中將微型溫度感測器及微加熱器整合在不同基材之微重組器內，除了量測及控制溫度外，並可改善性能及減低CO含量。

在本研究中，應用微機電技術在不同基材上製作多樣化的流道型式來提升甲醇轉化率。在微重組器內製作白金電阻式微溫度感測器及微加熱器。主要的優點在於白金微溫度感測器的準確度及靈敏度比一般的傳統熱電偶高。雖然在許多領域中微溫度感測器及微加熱器已經使用於量測及控制溫度，但是在微重組器和商業產品中都沒有使用。因此整合微型溫度感測器及微加熱器在基材之微重組器內以達到縮小尺寸及改善性能，在目前尚屬於較新的研究。

關鍵字

微溫度感測器 ； 微加熱器 ； 微重組器

並列摘要

With advances in micro fuel cell development, the production of hydrogen for micro reformer has become increasingly important. However, some problems regarding the micro reformer are yet to be resolved. These include reducing the size, reducing the quantity of CO and combining the fuel cell, among others. Accordingly, in this investigation, a micro temperature sensor and a heater are combined inside the substrate micro reformer to measure and control the temperature and thus improve performance and minimize the concentration of CO.

In this work, micro-electro-mechanical-systems (MEMS) of the micro channel type are fabricated on the substrate to enhance the methanol conversion ratio. The micro temperature sensor and heater are made of gold and placed inside the micro reformer. Although the micro temperature sensor and heater have already been used to measure and control temperature in numerous fields, they have not been employed in micro reformer and commercial products. Therefore, this study presents a new approach for integrating a micro temperature sensor and heater in substrate micro reformer to minimize the size and improve performance.

並列關鍵字

Micro Temperature Sensor ； Micro Heater ； Micro Reformer

參考文獻

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