金屬薄膜之光學與機械性質研究

INVESTIGATION OF THE OPTICAL AND MECHANICAL PROPERTIES OF METALLIC LAYER

王奕翔(Yi-Hsiang Wang)

指導教授 ： 何旭川

元智大學/工程學院/機械工程學系/碩士(2007年)

https://doi.org/10.6838/YZU.2007.00135

摘要

金屬薄膜在廣大的波長範圍內都有高反射率，可做為改變光線路徑及接收光信號的反射鏡，如反射式望遠鏡、高效率發光二極體等。由於金屬薄膜的機械強度不佳，清潔金屬薄膜表面塵埃容易因擦拭產生損壞必須再加鍍一層保護層。本文主要探討鋁膜(Al)與銀膜(Ag)，光學反射率與機械性質，首先應用Essential Macleod光學薄膜設計軟體計算純金屬薄膜與外加保護層之光學反射率，並藉由參數分析求得最大反射率之最佳膜厚。再實作出各種不同膜厚之試片，以光譜儀量測薄膜在可見光之反射率並與理論計算比較，並應用奈米壓痕技術檢測薄膜硬度與楊氏係數，探討製程溫度與溫溼環境之影響。實驗結果顯示二氧化矽對銀膜在溫溼環境之保護確能有效減少反射率之下降;二氧化矽對金屬薄膜會隨著製程溫度升高而附著性增加，隨著壓痕深度增加硬度逐漸減少，壓痕深度愈深受基材性質之影響愈明顯，銀膜楊氏係數則易受製程溫度產生不同之變化趨勢。

關鍵字

電子槍蒸鍍 ； 反射率奈米壓痕 ； 機械性質 ； 製程溫度溫溼環境

並列摘要

It is common in an optical system using metallic layer as reflecting mirror to change the optical path. Aluminum(Al) and Silver(Ag) have been widely used and deposited on the silica-base of substrate to form a metallic thin film. In this paper the metallic films of Al and Ag are deposited on
B270 substrate by using electronic-beam vapor deposition technique. The effect of thickness on the reflectance are determined through parametric study and validated with experimental measurement. The mechanical properties and adhesive strength of the metallic film are determined by
nano-indentation and attachment test, respectively. Nano-indentation tests show that the hardness of the films is dependent on the indentation depth. To protect the metallic films from dioxide, a thin film of silicon oxide SiO2 is deposited on the top of the metallic film. The effects of the substrate temperature during the depositing process on the reflectance and mechanical properties are presented.

並列關鍵字

electronic-beam vapor deposition ； reflectance ； nano-indentation ； substrate temperature ； humid environment

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