微波電漿化學氣相沈積系統之遠端監控系統規劃設計

本研究目的，是以研發鑽石薄膜以及奈米碳管之實驗工作平臺，所使用之微波電漿化學氣相沈積系統為研究對象，架設其自動化所需之機構，以及制動器，並擷取其設備感測器之訊號並透過單晶片處理，並且輸出控制訊號至實驗工作平台，藉以達成控制，並透過網路單晶片模組，以及遠端的人機介面，來達成遠端監控的目標，完成遠端監控之整合架構。本架構可提供原有工作平台之手動操控模式，近端手動遙控操作模式，以及遠端網路監控模式，並且提供安全性的考量，針對於此種使具有危險性的實驗環境；本架構在穩定性和調整效率上，可以達到比原有架構之手動操作更迅速、精確性更高、反射功率更低的結果，並且同時提升此系統之重現性、成功率，以及在實驗過程中變換參數之可靠性，增加日後實驗的多元性。

關鍵字

遠端監控；微波電漿化學氣相沈積系統；機電整合

並列摘要

This article force on the microwave plasma chemical vapor deposit system which is used for diamond membrane and carbon nano tube experiment platform. We not only build an automatically mechanism and actuator. But also use single chip to acquire the system sensing information. Through the single chip, it handles the sensing data, calculation, and sends the control signal to actuator to achieve the control goal. Beside, we also develop a single chip based internet module and man-machine interface in client side. Make the idea of remote control realized by integrating internet function with original system. This control framework offer original manual control mode, near automation control mode and remote automation control mode. With this architecture, operator could stay way from the system without facing the dangerous experiment. Compare to the manual operation, automatically control increases the stability and efficiency. This saves much more time, improve the control accuracy, and lower the reflect power. Not only make the experiment repeatable, raise the successful rate, but also provide a possible way to change the parameter during experience proceeding. And make the experience diversification.