This thesis studies the slip motion of spacers induced by the vibrating of ultrasonic cleaning during TFT-LCD process. First, we analyzed and discussed the slip motion of spacer of TFT LCD panel and discovered that the vibrating of ultrasonic cleaning led to the slip motion of spacer. According to the theories of friction, we described the slip motion phenomenon of the spacer. The effects of various parameters, such as the size, hardness, elasticity, surface treatment layer of the spacer, were investigated in this study.