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  • 學位論文

微型熱電偶及電壓感測器應用於燃料電池內部及時監測

Micro thermocouple and voltage sensor for fuel cell real time interior monitoring

指導教授 : 李其源

摘要


在燃料電池中,膜電極組之溫度與電壓分佈對其性能具有關鍵性的影響,一般只能藉由在燃料電池外部量測或進行侵入式量測,因此無法確實量測到內部的變化,而本研究為開發出微型感測器以減少絕緣面積並降低對電池之影響。 本研究利用微機電系統技術,應用創新整合可撓式微型電阻式、熱電偶式溫度、電壓感測器,並以PI薄片(厚度50μm)作為可撓式基材,其優點為體積小能夠被放置在燃料電池內部任何一個位置,且無須另外設計支撐框架,因此整合式微感測器同時具有多功能、隨插式、高精確性、高線性度、高靈敏度、可撓強韌、批次製造、反應時間快等優點。 利用整合式微感測器嵌入於燃料電池中並組裝以量測燃料電池內部之溫度、電壓參數等,藉由整合式微感測器在燃料電池開始工作後,可讓使用者能正確掌握與即時監控燃料電池內部之溫度狀態和電壓分佈,本研究並且將微型熱電偶以及微型電阻式溫度感測器嵌入燃料電池內部做比較,其結果發現微型熱電偶式溫度感測器之製程較方便而且響應時間較為快速。

並列摘要


The temperature and voltage distribution in membrane electrode assembly (MEA) importantly affect the performance of fuel cell. Conventional methods can only get the interior information of fuel cell by modelling or invasive measurement. This work presents develops flexible and multi-functional micro sensors which decrease the insulating area of MEA and have a smaller effect on fuel cells. By using micro-electro-mechanical systems (MEMS) for fabricating micro flexible thermocouple, RTD and voltage sensor, this work uses polyimide (PI) film (50μm) as a flexible substrate, it is small enough to place anywhere between MEA and flow channel, and no support frame is required. Therefore, the micro sensors that integrated into the fuel cell have the advantage of multi-function, high accuracy, high linearity, high sensitivity, extreme flexibility, mass production and short response time. Integrated micro sensors are embedded in a fuel cell to determine the temperature and voltage parameters in the inner flow channel of a fuel cell. Users can monitor the interior temperature and voltage distribution in the flow channel of a fuel cell. This work also compares the micro thermocouple with the micro RTD sensor, it is founded that the micro thermocouple has an easier fabrication process and has a faster response time.

參考文獻


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