- 學位論文
玻璃基板之氣浮式輸送系統實作
The Implementation of Air Floating System for Glass Substrate
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摘要
本論文目的在於實作分析一個能擁有穩定度及抗震性之氣浮輸送系統，提出一種新式的進排氣通道設計，其特點在於截流器及氣室的相互運作。當玻璃基板的承載高度改變時，截流器會依據外部負載的變化，自行平衡調節氣膜層內的壓力，以提高氣浮輸送系統的抗震性。 從實作中量測的位移曲線可以得知玻璃基板的承載高度與最大震動差，藉此可推估氣浮輸送系統承載性能。本論文共設計三種新式的進排氣通道結構：NAVT1截流器孔徑與氣室深度最小；NAVT次之，NAVT2最大。歸納結果顯示：玻璃基板的承載高度與供氣速度及截流器孔徑有相當關係，並由供氣速度主導。 新式的進排氣通道設計較佳操作條件是供氣速度為0.61~1.32 m/s及3.57~4.11 m/s。最大震動差最多可降低約41.8%。增加負壓排氣裝置有助於提升玻璃基板的承載性能，減小約7~19μm之最大震動差。綜合結果說明擁有新式的進排氣通道之氣浮輸送系統對承載性能有正向的效果，並同時驗證靜壓氣體軸承的設計理念能有效提高氣浮輸送系統承載性能。
並列摘要
This study is to design an air-floating table system possessing a well stability and vibration resistance. A new structure has been proposed that a designed conduit combines the restrictor and air pocket. The flow resistance will be changed according to the floating height of the carrier changes. The pressure in the air cushion layer will be adjusted by the restrictor automatically depending on the resistance of the load, so that the vibration resistance is therefore enhanced. By assessing the difference of the floating height and amplitude, the displacement response curve can be measured and used to represent the performance of the floating system. The results show that the simulation is correct. Three different conduits with new structure are proposed in this study. NAAT2 has a biggest restrictor and air pocket depth, whereas NAAT1 has the smallest, and those of NAAT are intermediate. The results show that the floating height is responsible for the feeding velocity. According to the results, the operating condition is better to set the feeding velocity between 0.61 and 1.32 m/s and 3.57 and 4.11 m/s. The best enhancement of the difference is seen about 41.8%. By setting up the vacuum apparatus could improve the performance. The amplitude difference of NAVT1 is about 7~19 μm, less than NAAT1. The air-floating table system with novel conduits is seen a positive effect on the floating characteristic and verifies, and the performance of the system is therefore enhanced by the idea of the aerostatic bearing.
參考文獻
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