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  • 學位論文

台灣半導體相關產業重大災害原因探討與分析

Trends in Major Incidents of Semiconductor-related Industries in Taiwan

指導教授 : 陳振和

摘要


本研究收集與分析自 1995 年至 2007 年台灣半導體相關產業重大災害事件。共收集了 59 個災害案例。探討半導體產業上、下游較具高風險性的工廠與導致災害發生的重大原因。比較產生災害的製程或化學品,以確認何者易導致較重大災害或較大的經濟損失。災害的種類可分為四大類型,各為火災、爆炸、爆炸引起火災及有毒或有害化學品外洩。統計分析結果以半導體製業、PCB 製造業及電子組裝業較容易產生重大災害。發生災害事故以 2000 年及 2006 年次數較多,而一年中較容易發生事故在電子業旺季的 5 月份至 12 月份。發生災害的次數以火災所佔比率最高約 59%。59件災害事故總死亡人數為 11 人,總受傷人數為 225 人,設備及直接財物損失約 311 億元新台幣。矽甲烷及可燃性物質最容易導致半導體相關工廠的火災。半導體相關工廠廢氣排放管吸附或殘留的矽甲烷引起廢氣排放管火災並延燒至整座工廠,造成重大的損害。造成重大的損害最嚴重的半導體相關工廠火災全部損失約新台幣122億(約3億7仟萬美元)。

並列摘要


Reactive chemicals and combustible materials have led to numerous losses in Semiconductor-related industry in Taiwan. Fifty nine incidents were collected and analyzed on related information to provide an integrated overviews of such events in the past thirteen years. Various types of factories either in the upstream or downstream of semiconductor-related industry were reviewed to deduce which kind of plant is feasible to possesses the higher risk of occurrence. Different kinds of chemicals or processes were compared with each other to verify the causes which led to the higher or largest loss already happened. Accidental fires caused by saline or flammable vapors are the dominant types of incidents in the semiconductor plant in comparison to any other types of materials. Besides, explosions, release of hazardous chemicals, and injuries by hazardous or corrosive chemicals are the three kinds of most common incidents encountered. Fire spread from the common exhaust duct or relief header always resulted in the largest loss among the reported events. The most serious lesson learnt from these losses was about three hundred and seventy million us dollars.

參考文獻


19. Fen Hsieh, Development of Micro-Array Release Sensors, Master Thesis, National Yunlin University of Science and Technology, Yunlin, Taiwan, R. O. C., 2003.
4. Semiconductor Equipment and materials International, USA, 1993; “SEMI S2-93A: Safety Guidelines for Semiconductor Manufacturing Equipment: 1-12.
7. Factory Mutual Research Co. Data Sheet 7-7/17-12, Semiconductor Fabrication Facilities, January, 2001.
10. Hans-goachim Uth, Trends in major industrial accidents in Germany, J. Loss Prevention in the Process Industries, 12, P.69-73 (1999).
11.Christian Kirchesteiger, Trends in Accidents, Disasters and Risk Sources in Europe, J. Loss Prevention in the Process Industries, 12, P.7-17 (1999).

被引用紀錄


丁祜祥(2013)。變更管理制度之安全管理研究〔碩士論文,中原大學〕。華藝線上圖書館。https://doi.org/10.6840/CYCU.2013.00064
林宜洲(2012)。保護層分析於印刷電路板鍍銅設備火災預防應用研究〔碩士論文,國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-1903201314445006

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