科技產業為國家重要的經濟動能,同時也創造大量的就業機會,面對日益 競爭的環境,絕不希望任何原因造成生產片刻中斷的情況,更遑論因火災造成 生產長期的停擺;這不僅僅是業者的損失,更會影響到社會安定以及人力資源 的分配,並降低國際的競爭力。有鑑於此,各科技產業廠商如半導體/面板業者 等皆投入大量的人力進行演練/ERT 訓練/風險評估等與強化消防系統/緊急通訊 系統等設備,力求於火災發生初期,即刻掌握並給予有效的控制,希冀減低災 損與維護人員的安全。而科技產業為維持產品的高品質與穩定性,大都將生產 廠房設計為無塵室,並且於內部置放價值昂貴的設備如離子植入機、濕式清洗 機等,然而許多昂貴的設備於生產的過程中,也需使用多種可燃性氣體,就經 濟價值與風險層面的考量,也已進行了相當多的研究,亦制定了相關的規定與 確切的建議。 以”極早期偵煙系統(空氣取樣型偵煙系統Air sampling smoke detection system)”之配置,無塵室區域內現已有確切的建議安裝位置;但針對非無塵室 區域,大多依廠商建議設置,而無相關研究證實是否適用?故本研究將以此議 題做為研究主軸,針對無塵室區域外,蒐集多個廠區的設置現況,與多年的事 故案例進行分析,並藉由影響程度/發生頻率與誤報頻率加以判別,制訂出高/ 中/低風險之設備。其中針對高風險設備建議應設置極早期偵煙系統,而低風險 設備則無須設置,以節省建置成本又能達到妥適的防護,藉此提供最佳化的設 置建議。 為讓極早期偵煙系統發揮最大效益,更以總應變時間(偵測/確認/切離/回報) 為前提,針對各項因素進行討論與修正,如取樣管合理設置/演練的步驟與路 徑…等,希望不只能在最短的時間偵測出設備燒毀,更能在開關跳脫(電源喪失) 前,即進行電源切離的工作,不要造成任何生產中斷的現象。
The science and technology industry not only provides country large volume of job creation but also as the main driving force for economy development. Thus any production shut down is not allowed, for the long term production shut down caused by fire will be worse impact. The social security, human resource allocation and international competition capability will be knocked down. All science and technology industry (such as semiconductor, panel industry. and etc.) been investing high volume manpower (for ERT training/ risk assessment…) and facilities (Fire fighting system, emergency communication system and etc.) to control fire situation in the beginning stage, it will reduce damage loss and protect people. The clean room is major production facilities installed, because the dust-free space with reliable production performance for semiconductor. The facilities including a lot of high value equipment such as ion implantation equipment, wet bench and etc., and these equipments apply various type of flammable gas during production. There were a lot of research in consider of economy value and protection risk to determine regulations and suggestions. The clean room has been with definite position for the Air sampling smoke detection system. But not for non-clean room area; most cases upon vendor suggestion for set up and not confirmed by research. The thesis is for this subject and research in a few set up cases related accident analysis expect to define the FMEA (failure mold evaluation analysis) for high/middle/low risk level. (Suggestion: Low risk no need to set up air sampling smoke detection system) The research provides optimized set up equipment with safety protection and cost saving. In order to achieve the maximum of efficiency, the Air sampling smoke detection system should focus on the total response time (Detect/ Confirm / Shut Off / Report) as a precondition. In accordance with various factors for discussion and correction such as the sampling pipe allocation / steps & routes of drill ... etc. The system not only detects any equipment burning in shortest time but also the device shut off immediately in chain reaction before power outage. We hope any producing interruption does not occur.