低漏電共軛高分子場效電晶體之研製

The fabrication of Poly Field-effect-transistor with low leakage

吳孟穎(Meng-Ying Wu)

指導教授 ： 洪勝富教授 ； 孟心飛教授

國立清華大學/電機資訊學院/電子工程研究所/碩士(2007年)

https://doi.org/10.6843/NTHU.2007.00091

摘要

有機發光二極體因其擁有較快的響應時間、視角更寬廣、低功率消耗和更高對比、高亮度的影像，所以成為現今的熱門研究主題。其中更因其可撓性，使得OLED和PLED的發展越來越受到重視，尤以PLED容易發展大面積尺寸的優點為甚。所以本實驗室的重點即在於應用主動式矩陣驅動PLED，所以提升OTFT的場效載子移動率(mobility)，提高元件的響應頻率和降低漏電，提升元件開關比(on/off ratio)，延長PLED發光的時間，即為我們努力的方向。

我們的絕緣層是送長的APCVD/PECVD，我們利用polymer如PMMA (poly(methylmethacrylate))和PVP(Polyvinylphenol)來填補因成長oxide過程中出現的缺陷來降低經由閘極的漏電流。在後段處理方面，我們先利用文獻上的方法，N2 annealing和NH3處理因為P3HT摻雜所引起的漏電流。接著我們探討HMDS和介面對於漏電的影響，分析手套箱的水氧值、光的照射、加熱以及抽真空的與否和漏電的關係，最後利用Passivation(PEGDE/Al)覆蓋主動區的方式來隔絕水氧。我們的最好實驗結果是場效載子移動率在0.1cm2V-1s-1的時候，電流開關比達到了104，使元件更進一步達到應用的需求。

關鍵字

有機薄膜電晶體 ； P3HT ； 載子遷移率 ； ON/OFF ratio

並列摘要

Organic light-emitting diodes (OLED) possess many advantages, such as faster response time, more broad of the visual angle, lower power consumption, higher contrast ratio and higher brightness. Among them, because of its flexibility, the developments of OLED and PLED are more and more important. The research of our laboratory is that using active matrix drive PLED, so improving the mobility of OTFT and reducing leakage current to improve on/off ratio is studied.

Our insulator is APCVD/PECVD oxide. We make up the defect which grow up with oxide to reduce the gate leakage current by using polymer like PMMA (poly (methylmethacrylate )) and PVP (Polyvinylphenol ). Then we use N2 annealing and NH3 treatment to deal with the leakage current by P3HT doping. We also discuss the influence of HMDS and interface to the leakage current, and analyze the relationship between leakage current and the water/oxygen value in glove box, lighting, heating and vacuuming. Finally, we cover the active area to prevent water/oxygen by using passivation. Our best result is that sample mobility achieve 0.1cm2V-1s-1 order and the on/off ratio up to 104.

並列關鍵字

organic thin film transistor ； P3HT ； mobility ； ON/OFF ratio