金氧半導體微機電(CMOS-MEMS)震盪器電路為組成感測器系統單晶片的重要元件之一,然而此電路於相位雜訊與溫度穩定性兩方面卻略顯低落。本論文針對全整合式CMOS-MEMS震盪器電路提出改進之設計方法,以其能改善現存CMOS-MEMS震盪器的不足之處。 本文首先提出一整合微型加熱器之雙鉗音叉式共振器,其頻率約為1.2 MHz並內嵌於標準CMOS後段製程。由於借助半導體製程中二氧化矽高熱阻絕率的特性,此溫控共振器的加熱效率高達 266 °C/mW。此外,此共振器之溫度係數亦經過特殊設計,經由材料之被動補償後,其本質溫度係數約僅 +5.1 ppm/°C。因此,結合上述兩項特點並輔以定電阻控溫之概念,此溫控共振器於溫差125°C的範圍內操作時總頻飄約小於120ppm並消耗低於0.5mW的加熱功率,其等效溫度係數低於1 ppm/°C。我們亦設計了低雜訊CMOS震盪器電路,搭配此共振器後其相位雜訊於距震盪頻率1kHz之偏移處為-112 dBc/Hz,於距震盪頻率1kHz之偏移處為-120 dBc/Hz,其消耗功率低於1.3mW。此震盪器之性能與其他state-of-the-art相當。 除了溫控震盪器以外,我們也針對CMOS-MEMS震盪器之相位雜訊做深入的探討,可發現震盪器之近端相位雜訊與共振器的非線性程度高度相關。當我們將震盪器系統操作於極度非線性之區域時,近端相位雜訊能獲得相當程度的改善。此論文中1.2 MHz的CMOS-MEMS雙鉗樑式震盪器最佳的近端相位雜訊為:於距震盪頻率10Hz之偏移處為-77 dBc/Hz,於距震盪頻率100Hz之偏移處為-97 dBc/Hz,其性能指標(FOM)為-176.9dB。而遠端相位雜訊則於共振器之熱雜訊以及電路雜訊相關,無法利用非線性效應改善。 為了徹底改善振盪器性能,本文亦提出了一組新型的CMOS-MEMS後製程。利用CMOS製程中之氮化鈦層,我們可以同時實現較強的機電耦合並能改善震盪器的頻率穩定度。此製程不但解決了傳統CMOS-MEMS共振器中因介電質誘捕多餘電荷所造成頻率隨時間飄移的問題,並可實現高度複雜的共振器結構設計,例如超低溫度係數(sub-ppm/°C TCf)之共振器元件。雖然我們使用0.35 um製程驗證此平台,其概念仍可以向下相容至其他以鋁為後段製程主體的CMOS高階製程節點,例如0.18 um或0.25 um。
This work presents the design and characterization of the monolithic CMOS-MEMS oscillators for temperature compensated clocks. An innovative ovenized double-ended tuning fork (DETF) resonator with an embedded heater trace is implemented for high heating efficiency. The heating efficiency of the resonator is greater than 266 °C/mW, which consumes less than 0.5 mW for 125°C temperature span (-40°C to 85°C). In addition, the resonator is designed to achieve a low temperature coefficient of frequency (TCf) of +5.1 ppm/°C. Combined with micro-oven operations, frequency variation less than 120 ppm across 125°C temperature span is demonstrated under a constant-resistance control. As a result, the compensated TCf less than 1 ppm/°C in this work outperforms other single-chip, BEOL-embedded CMOS-MEMS resonators to date. The monolithic CMOS-MEMS oscillator based on the 1.2-MHz DETF ovenized resonator is also realized in this work. The oscillator phase noise of -112 dBc/Hz at 1-kHz offset and -120 dBc/Hz at 1-MHz offset is demonstrated, which is on par with the state-of-the-art flexural-mode MEMS oscillators but with better circuit integration scheme. In addition to the ovenized oscillator, the phase noise spectrum of the monolithic CMOS-MEMS resonator is studied in this work. It is recognized that the close-to-carrier phase noise for the MEMS oscillator is mainly dominated by the nonlinear amplitude-to-phase noise conversion effect. By operating the nonlinear oscillator under proper conditions, the nonlinear noise conversion can be suppressed, resulting an improved phase noise. With the 1.2 MHz CMOS-MEMS DETF resonator, the best-case phase noise of -77 dBc/Hz at 10-Hz offset and -97 dBc/Hz at 100-Hz offset is demonstrated, featuring a figure of merit of -176.9 dB. To further improve the performance for CMOS-MEMS oscillator systems in the future implementations, a titanium nitride composite (TiN-C) MEMS platform is proposed not only for enhanced electrostatic transduction but also for improved frequency stability. The dielectric charging issue for traditional CMOS-MEMS resonators is solved in this platform by means of TiN-based electrodes. Moreover, the sub-ppm/°C TCf is also demonstrated in this work with only passive temperature compensation scheme. Importantly, the proposed platform can be scaled to advanced technology nodes for more functionality and improved performance.