半導體晶圓製造派工規則文獻回顧與案例探討

A review and A Case Study of Semiconductor Wafer Fabrication Dispatching Rules

陳肇楷(Chen, Chao Kai)

指導教授 ： 洪一峯

國立清華大學/工學院/工業工程與工程管理學系碩士在職專班/碩士(2015年)

摘要

摘要
在半導體晶圓製造，因為其生產製造程序非常複雜，生產排程或生產管制在半導體晶圓廠裡變得非常繁瑣，因此所謂的派工法則(dispatching rules)便在這個產業廣泛被使用。隨著產業技術的發展與演進，以及製程的精進下，產品變得更加地複雜，生產線排程也更加複雜化，因此生產線反應速度要再更快。更搭配著自動化生產的趨勢下，及因應不同情境下的派工法則，變化型方法也跟在學界或業界被廣泛討論。
本研究回顧這類議題的文獻，試圖探討派工法則的概念，以及欲達成的目的。自1980年到2010年這近三十年，學者與業界所討論的派工法則，其基礎規則上大致是雷同的。最近幾年所探討的派工法則，則非僅局限在那一種方式較好，而是配合產業發展，在面對不同的情境下，混合多種派工法則來因應不同生產指標的要求。不同的工廠發展出不同的客製化的派工法則。半導體產業的技術發展，從5吋晶圓，6吋，8吋，直到現在業界主力的12吋晶圓。隨著晶圓面積逐漸加大，技術複雜度更高，限制更多，加上自動化搬運等因素，人工排程已無法應付如此龐大的計算與及時性。
本論文研究去探討一個半導體業晶圓製造廠的實際案例，從它的發展過程中，看其因應不同時期、不同的生產目標與需求、自動化派工的演進過程。從案例工廠發展，說明派工方式的進化，去了解它是為了滿足哪些生產目標而發展出什麼樣的派工策略。本論文研究中提出一個稱之為PR(Pull Ratio)的派工方法，應用於案例工廠中，可使其同時作到生產線平衡與答交等目標。另外在「等候時間限制」的派工，本論文中提出一個較好的方法，使其更有效率地處理這一類的問題。這案例的派工方法的發展與進化的過程，恰也呼應了在文獻探討中所看到的現象。最後舉出兩個例子，可作為未來再研究的方向。
關鍵字：派工法則、生產排程、晶圓製造、半導體製造、生產指標

關鍵字

派工法則 ； 生產排程 ； 晶圓製造 ； 半導體製造 ； 生產指標

並列摘要

Abstract
In the semiconductor wafer fabrication field, due to its complicated manufacturing process, its production scheduling as well as production control has become very tedious in the semiconductor wafer fab. Therefore, the so-called dispatching rules are thus widely used in this industry. Due to technology development and evolution in the industry and the progress in the manufacturing process, the production process has become more and more complicated, and the scheduling in the production line has become more complicated too. Thus, the response time in the production line should become faster and faster. Moreover, under the influence of the trend of automated production and to cope with the dispatching requirements under different situations, various methods were widely discussed in the academy or industry.
In this thesis, literatures in this topic are reviewed, and an attempt is made to investigate the concept of dispatching rule and their purposes. During the three decades from 1980 to 2010, the dispatching rules discussed in the academy and industry were similar. However, instead of being limited to single objective, the dispatching rules investigated in recent years are to act in accordance with the industry development and to cope with different situations, and multiple dispatching rules are mixed to meet the requirements of different production objectives. Therefore, different factories have developed different customized dispatching rules. In the evolution of the semiconductor technology, it goes from the 5 inch wafer in the very beginning, then to 6 inch and 8 inch, and today, 12 inch wafer has become the mainstream in the industry. As the wafer size increases, its technological complexity is higher, and it brings more limitations. Moreover, with the considerations of factors such as automated transport, manual scheduling cannot handle such huge computation in time.
This thesis takes a real case of semiconductor wafer fab company as its study target, from the development process of this company, the evolution of automated dispatching rule can be seen for different periods and different production goals. From the present status of development of the factory in this study case, the evolution status of the dispatching method is described. It can be understood from the case study that what kind of dispatching strategy was developed to satisfy what kind of production goal.
In this thesis, one dispatching method called PR (Pull Ratio) is proposed to be applied to the factory in the case study so that it can achieve both the goal of balance in the production line and the goal of on-time delivery. In addition, when dispatching problem such as “queuing time limitation” is met, a better control method is proposed to apply in the production dispatching rule for the case study. In addition to the proposal of two better dispatching methods, the development and evolution process of the dispatching method in this study case can just echo the phenomenon seen in the literature review. Finally, two examples are mentioned as possible directions in future study.

Keywords: Dispatching Rule, production scheduling, wafer fabrication, semiconductor manufacturing production indices

並列關鍵字

Dispatching Rule ； production scheduling ； wafer fabrication ； semiconductor manufacturing production indices

參考文獻

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