本研究論文欲發展臨場光誘發分析技術於電子顯微鏡中,因其顯微術光源為高能電子束,腔體需保持一高真空之環境下,因此造成欲分析樣品受到限制,故此研究中利用本實驗室所發展的微型化濕室環境腔體,將液體樣品封裝於微型環境腔體內,進而能於穿透式電子顯微鏡中觀測液態樣品之反應過程。再搭載光纖導入光束系統裝置於JEM-2010穿透式電子顯微鏡腔體中,進行奈米尺度下臨場光誘發反應之觀測,並使用自行設計之光強度偵測器,分析在特定光強度值下光誘發反應之機制。 本論文研究已成功發展臨場觀測光誘發反應之系統,並且能夠隨時更換不同波長之光源,以便應用於不同的光誘發反應中。此外,在欲觀測之光誘發沉積反應部分,已於光學顯微鏡與電子顯微鏡中,觀察到反應前後影像的變化與差異,並搭配X光微區分析與元素分析圖譜進行定性分析。在光誘發產氣反映部分,除在光學顯微鏡下臨場觀測到反應,也已成功應用所開發之光源系統搭載電子顯微術,得到其臨場反應之影像。
In this study, we design a “fiber-based system” which is using a UV light source with optical fiber to induce UV light through the EDS pole for JEM-2010. Because the TEM chamber must maintain at ultra-high vacuum environment, the sample can only in solid state. In order to observe wet sample in TEM, we use the wet-cell which is designed by our laboratory to prepare samples. Combine the fiber-based system with wet-cell technology let us having the chance to in-situ observes the photo-induced catalysis reaction in EM under nano-scale. We can confirm that the light-induced reaction is actually occurred under OM and TEM by the in-situ movies, difference in the images and the EDS analysis. The result makes sure that our home-make light induced system for TEM is workable.