The Passivation Effects of HNO3 Treatments and Al2O3/TEOS Processes on Modified Grating Solar Cell (MGSC)

使用硝酸表面改質與氧化鋁/四乙氧基矽烷沉積之氧化矽對改良式欄柵太陽能電池表面鈍化的影響

簡國凱(Guo-Kai Jian)

指導教授 ： 黃惠良

國立清華大學/電機資訊學院/電子工程研究所/碩士(2009年)

摘要

In this thesis, the modified grating solar cells with porous silicon structure were fabricated by electrochemical etching (ECE). The morphology of the macropores was examined by the SEM analysis. The effects of HNO3 treatment and post oxidation annealing (POA) were investigated. The passivation techniques with TEOS and Al2O3 were also studied. The electrical properties of the modified grating solar cells were characterized through the dark and photo current-voltage (I-V) measurements.
The HNO3 treatment incorporated POA show positive effects on the Jsc improvement. The Jsc can achieve 36 ~ 38 mA/cm2. The devices with sputtered Al2O3 film show a little Voc improvement. By introduced the SiNx hard mask process (SMP), the Voc enhances to 0.54V and 0.58V, the maximal F. F. can reach 0.61 and 0.72 for high – ρ and low – ρ devices, respectively.

關鍵字

欄柵太陽能電池 ； 鈍化

並列摘要

無資料

並列關鍵字

grating solar cell ； passivation

參考文獻

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