水汽對化學氣相沉積法成長奈米碳管之探討

Effects of water vapor on the growth of Carbon nanotubes synthesized

邱國維(Kuo-Wei Chiu)

指導教授 ： 戴念華 ； 黃金花

國立清華大學/工學院/材料科學工程學系/碩士(2006年)

https://doi.org/10.6843/NTHU.2006.00448

摘要

本研究以熱裂解化學氣相沉積法在快速升降溫系統中成長奈米碳管陣列，其中又分為單壁和多壁陣列的成長，兩者製程最大的不同點在於催化劑的選擇，多壁奈米碳管陣列使用的催化劑為鐵，成長高度可以達到100 μm 以上，而單壁陣列以鋁鐵鉬為催化劑，經過一系列的參數探討後可以大大提升品質，其ID/IG ratio約為0.03，而藉由拉曼分析可以知道鋁鐵鉬合金催化劑系統可以控制碳管管徑分佈，本研究並且探討鋁承載層所扮演的角色。
本研究也探討在成長奈米碳管製程中導入水汽，設計不同導入水汽的時機，藉由電子顯微鏡和拉曼觀察其結構和品質的改變，並且由實驗的結果探討水汽對於奈米碳管成長的影響。

關鍵字

水汽 ； 奈米碳管

並列摘要

In this work, a rapid heating and cooling system (RHCS) for synthesizing carbon nanotubes (CNTs) array through the thermal chemical vapor deposition (CVD) process is proposed. Depending on the catalyst been used, single-wall or multi-wall CNTs can be synthesized. The catalyst for multi-wall CNTs is Fe and the length of CNTs array is over 100 μm. For fabricating single-wall CNTs (SWNTs), the catalyst is Al/Fe/Mo and the ID/IG ratio of the synthesized single-wall CNTs is around 0.03. The longest SWNTs been synthesized is over 3μm. In this study, the influences of Al layer on the growth of SWNTs are discussed. Moreover, in order to enhance the CNT growth, water vapor was introduced into the chamber during CNT growth. Different timing for the introducing of water vapor into chamber was designed and the influences of water vapor on the CNT growth are investigated. Field-emission scanning electron microscope and Raman were adopted to study the variation of structure.

並列關鍵字

water vapor ； carbon nanotube

參考文獻

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