- 學位論文
半導體廠務監控專家系統之建立與應用
Establishment and Application of an Expert System for Semiconductor Facility Management Control System
摘要
『二兆雙星計畫』其中之一的產業---半導體，在政府的推動下蓬勃發展，台灣12吋晶圓廠密集度，堪稱世界第一，半導體製程技術亦快速發展，最新的65奈米技術已達量產階段。半導體建廠成本昂貴，關心的焦點除了產能和良率，更重視人員、設備的安全與事故災害的緊急應變能力。廠務系統監控中心的功能機制為維持晶圓廠生產運作架構的重要一環，尤其值班工程師對廠務監控系統警報和突發事件應變處理能力，更是關鍵因素。 本研究計畫以廠務監控系統為基礎，應用案例式推理建構雛形專家系統，達到知識專家化、案例事故處理方法和經驗傳承，協助值班工程師對監控系統警報處理，透過人機介面引導迅速解決系統異常，避免重大生產損失。 經現場模擬之情境案例來驗證雛形專家系統，實驗結果顯示縮減工程師處理時間的效益並不顯著，但提高工程師處理程序正確性之效益顯著，有效地減少了人為處理疏失次數，問卷調查顯示使用者處理狀況信心度增加。
並列摘要
Semiconductor Industry of Two Trillion and Twin Star Industries Development Plan are prosperous under the Government’s impetus. The density of 12-inches wafers Fab. in Taiwan is the highest in the world and the technique of semiconductor process with 65 nanometer mass production is developed quickly. The cost of semiconductor Fab. is huge, and thus in addition to concern the capacity and yield , we should emphasize more on the safety of human, equipment, and the contingency capability of the disaster. The mechanism of facility monitoring center is an important function to maintain the safe and normal operation for the Fab. wafer production. It is also critical for the duty engineers to be able to handle the alarm of facility management control system and the contingency. In this study, a case-based reasoning expert system is established to assist the duty engineers to deal with the alarms in the facility management control system and prevent the serious property loss. This expert system has been verified through conducting an experiment in the plant. The experimental result demonstrated that although the process time was not reduced significantly, engineers’ procedure accuracy was enhanced and number of system errors was reduced significantly. The result of questionnaire indicated that engineers were satisfied with this expert system.