- 學位論文
以二元催化金屬於玻璃基板上低溫製備奈米碳管與其場發射性質
Low Temperature Growth of Carbon Nanotube on Glass Substrate Using Binary Catalysts and its Field Emission Properties
摘要
本研究是以鈷鈦二元催化金屬，低溫（550℃以下）製備奈米碳管於玻璃基板上，應用於大面積的場發射元件。我們發現金屬鈦可以有效幫助金屬鈷於溫度550℃以下成長奈米碳管，而且兩者間的膜厚與比例對奈米碳管成長也是有相當程度的影響。為了讓玻璃基板可以導電，以作為場發射元件的陰極端，本研究嘗試尋找適合鈷鈦催化金屬的底電極。 本研究同時發現使用不同的碳源流場，奈米碳管的成長會有不一樣的結果，以不同高度的載具來改變碳源流場，當增加載具的高度，奈米碳管的密度會增加，場發射性質也會跟著提升。奈米碳管的密度過高會造成遮蔽效應，為了改善這種現象，本研究嘗試利用熱處理氧化及氧電漿轟擊，製造更多的發射電子位置，以提升場發射性質。
並列摘要
Carbon nanotubes (CNTs) were synthesized on glass substrates at low temperature (550℃) using binary catalyst, Co/Ti, which is applicable to the preparation of large area field emission devices. It has been found that the catalyst activity is affected not only by the thickness of the catalysts, but also by their thickness ratio. In order to let the glass can conduct electricity, we try to find a lot of different materials as an electrode. The results were different when the samples were subjected to different flow field of carbon source. We have used the different height of the quartz boats to change the flow field during CNTs growth. The field emission current density increased with the stream velocity in the flow field. Screen effect due to high dense CNTs reduces the emission properties, and it can be alleviated by thermal oxidation or oxygen plasma. Additionally, we hope increase more emission site to shoot more electron.