Abstract The objective of this study is to develop a systematic approach to conduct capacity planning for Outgoing Quality Control (QOC) department in semiconductor Fabric. Managers usually determine the number of operators and machines base only on past experience or personal opinion. However, this approach overlooks the utilization rate of operators and machines as well as the uncertainties in demand and process time. In this dissertation, the simulation software, Flexsim is used to construct simulation model. The real demand and process time data of various workstations are collected. The distributions of these data are statistically tested. The real case is used to verify the accuracy of the simulation model. Based on the simulation model, the proper capacity plan is identified to achieve two goals. One is to minimize the number of operators or machines. Second is to ensure the probability that the cycle time is less or equal to 360 minutes is 90 percent.