氣相與液相表面聲波感測器元件與系統之研究、製作及開發

Investigation, Fabrication and Development of Surface Acoustic Wave Sensor Chip and System in gas and liquid

郝旭昶(Hsu-Chang Hao)

指導教授 ： 饒達仁

國立清華大學/工學院/奈米工程與微系統研究所/博士(2012年)

https://doi.org/10.6843/NTHU.2012.00264

摘要

本研究致力於開發陣列式表面聲波(Surface Acoustic Wave, SAW)氣相與液相量測系統，晶片材料的選擇上，本文選用高K2值之128º YX-LiNbO3 與YX-LiNbO3壓電基板，在其上製作指叉換能器（Interdigital Transducer, IDT），並將多種高分子聚合物或抗體固定修飾於感測區之上。將做好之晶片配合製作出之震盪電路，在以主動式之量測機制下，再結合感測環境系統以量測特定溶劑之揮發性氣體與特定生物檢體，經固定之薄膜捕捉標的物造成重量變化，導致表面聲波傳遞速度改變，由此觀察頻率飄移的下降量。
氣體感測器方面：利用1L四頸瓶系統以七種高分子薄膜對甲醇、乙醇、氨、三甲基胺、丙酮之量測，確定了陣列化的可行性，以長條圖、雷達圖做分析，可得知每種膜在不同測試條件下之反應特性，建立簡單的資料庫，利用異丙醇氣體模擬一未知氣體，進入感測系統，經過2-way階層式群集分析法(Hierarchical Clustering Analysis)及樹狀圖分析後，可正確地將異丙醇氣體與已知醇類歸為同一群集，並與胺類氣體分開為兩大群集，丙酮則被歸類為較靠近醇類之群集。
液體感測器方面：利用矽烷化的方式修飾SiO2表面，成功抗固定體於3 -aminopropyl triethoxy lsilane （ATPES）表面。連續式注入偵測蛋白質濃度由250~3μg/ml。捕捉標定細胞方面，在藉由光學與螢光影像，瞭解抗體固定後具有活性且在特定細胞濃度（K562、106 cell/ml; Jurkat、103 cell/ml） 1000:1下，成功的捕捉到標的細胞導致SH-SAW細胞感測器的頻率下降。

關鍵字

表面聲波 ； 高分子聚合物 ； 抗體 ； 蛋白質 ； 階層式群集分析法

並列摘要

This thesis gives a historical account of the development, and the theory of piezoelectric phenomenon, Rayleigh wave, shear horizontal plate wave, interdigital transducer (IDT), surface acoustic wave (SAW), performance criteria and device for application in sensor. The detection results for organic vapors by different polymer deposited on 128° YX-LiNbO3 surface acoustic wave (SAW) delay lines are studied in this work. The gas sensor array is based on 2×2 non-continuously working oscillators equipped with differently polymer-coated surface acoustic wave sensors.The SAW detection system which is employed to detect various organic molecules and bio-sample was prepared using two-port SAW resonators and a computer for signal acquisition and data process.
This gas sensor array system consists of SAW sensors, polymers with different polarity and function groups, and signal readout electronics. The appropriate coating materials on to the SAW crystal would be used for gas detection. The gas sensing properties of polymer film, deposited onto 1280YX-LiNbO3 substrate, have been monitored shift in frequency by SAW delay lines and analysis the properties of the gas sensor. The good result of tree-view from the two-way hierarchical clustering analysis is studied in this work after comparing the correlation between the coating materials and organic vapors. Furthermore, the SAW detection system can distinguish unknown gas or mixed gas by the database of pattern recognition in the future.
The Rayleigh-wave presents the very high decay and the SH-SAW presents a less energy decay when operating in liquid phase. For this reason, the SH-SAW device is selected to be used in gaseous and liquid phase application and The Y360-X LiTaO3 was selected as the substrate of the SH-SAW sensor chip. we developed an SH-SAW sensor to detect ipaB molecules by means of the antibody–antigen binding mechanism. The sensor showed stable relationship between its the oscillation frequency and the ipaB concentration in a protein solution. A SiO2 layer was on both the IDTs and the sensing area. The SiO2 waveguide used in these devices can be easily functionalized with 3-aminopropyltriethoxysilane (APTES) and to detect protein concentrations as low as 3 μg / ml. To replace the sensor surface antibody, the cell isolation and purification studied targeted cells (Jurkate), as a model for low abundance cells (1 ∶1,000), with more dilute cells as the ultimate goal. T cells were successfully separated on-chip from the mixed cell medium (Jurkate cells/ K562 cells, 1/1000). The results are quite promising and the developed SH-SAW sensor can be applied to the detection of various protein molecules with different antibody immobilization layers while maintaining all the beauties of general SAW sensors.

並列關鍵字

Surface Acoustic Wave ； Polymer ； antibody ； protein ； Hierarchical Clustering Analysis

參考文獻

48. 陳惠民. and 張哲魁, 用於生物醫學的新蛋白質晶片技術的開發與製造, in 國家奈米元件實驗室2006.

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