微透鏡製程平台開發及其於微光機電系統整合應用

本研究以液相微透鏡成型技術為主軸，以光固化膠分別製作出平凸、雙凸、球狀透鏡，並以微矽光學平台之製程整合為考量，將上述高分子微透鏡與靜態微結構進行同平面光路或出平面光路整合。本研究提出將紫外光固化膠液珠成型技術改以在液體底下執行，藉由調變外界環境液體的材料特性來調整膠材的曲率半徑，再以紫外光透過環境液體照射固化，透過此方法可免除直接調整膠材或是基板的問題，可於製程中大幅度調整液珠曲率半徑，並將製程技術應用於製造平凸微透鏡及雙凸微透鏡。上述製程除了可製作平凸或雙凸微透鏡外，本研究將延伸其製造概念，以液相製程環境製作全對稱的微球狀透鏡。本研究中將選取比重與膠材相近的環境液體為製程環境，此時膠材所受重力將與浮力抵銷，僅受表面張力作用成為全對稱球形，再以紫外光透過環境液體照射固化。球透鏡尺寸則可由液珠體積進行調整，亦可將球狀製程直接整合於微結構中，而全對稱的球狀透鏡將可應用於出平面或同平面光路的微矽光學平台中。最後再以光學影像穩定系統為例，首先進行光學系統之規格分析，再將高分子微透鏡整合微機電致動元件，完成雙軸移動微透鏡平台之製造與驗證。本研究中亦將微熱致動器搭配高分子微透鏡進行系統整合，藉由絕緣聯結的設計，連接熱致動器與微透鏡框架，可大幅提昇聯結的熱阻，達到電性絕緣、避免熱耦合至其他元件並提昇熱致動器效率。

關鍵字

微透鏡；微光學平台；熱致動器；影像穩定器

並列摘要

This study presented the lens profile modification process in liquid-phase medium. The radius of curvature of the photopolymer droplet can be modified by changing the ambiance during processing. This study further investigates the formation of polymer plano-convex and biconvex lens in a multi-phase ambience. This study further reports a new approach to fabricate discrete micro ball lens in a gravity-free and non-wetting liquid ambient. The liquid photopolymer, which is suspended and insoluble in the liquid medium, will form a sphere caused by the surface tension. After that, the photopolymer is solidified inside the liquid medium by using the UV-light to define the lens shape. The liquid-phase formed lens is with high surface quality. The formation of such polymer ball lens can also be achieved on the Si substrate with suspended micromachined structures. Such ball lens is easily employed for SiOB with optical axis in in-plane as well as out-of-plane directions. This study designs a polymer joint as a thermal isolation component to reduce the current and heat flow between micro thermal actuators for optical image stabilizer application. The optical stage is consisted of the V-beam thermal actuators for light tracking. To reduce the thermal coupling (through heat conduction) between these four actuators fabricated by SOI wafer, those components are connected by the low thermal conductivity joints.

並列關鍵字

microlens ； SiOB ； thermal actuator ； image stabilizer

參考文獻

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[12] R. R. A. Syms, H. Zou, J. Stagg, and H. Veladi, “Sliding-blade MEMS iris and variable optical attenuator,” Journal of Micromechanics and Microengineering, vol. 14, no. 12, p. 1700, 2004.

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微透鏡製程平台開發及其於微光機電系統整合應用

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