應用於微投影顯示技術之二維靜電式微掃描鏡回授控制系統設計與實現

Feedback Control System Design and Implementation of 2D Electrostatic Microscanner Applied for Pico-Projection Display Technology

陳泊瑜(Bo-Yu Chen)

指導教授 ： 陳榮順

國立清華大學/工學院/動力機械工程學系/碩士(2013年)

https://doi.org/10.6843/NTHU.2013.00335

摘要

本研究主要為改善靜電式微掃描鏡慢軸，在垂直方向上因掃描速度不均，而造成的明顯亮暗帶投影畫面品質，希望透過電容式感測訊號機制，量測微掃描鏡在致動過程中，元件等效電容值大小即時變化，且與實際的描軌跡相互參照驗證其正確性。同時建立靜電式微掃瞄鏡慢軸行為的動態模型，透過系統鑑別得到真實受控場的系統參數。將系統參數代入動態模型並輔以商用軟體Simulink與回授控制理論，設計及模擬微掃瞄鏡慢軸經控制器補償後之輸出響應。最後，實現加入PID控制器的完整閉迴路控制系統，以達到即時控制之目的並驗證其效能與可行性。

關鍵字

靜電式微掃描鏡控制 ； 電容式感測電路 ； PID控制器

參考文獻

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