研發硬 X 光顯微術用之波帶片及其應用於即時觀察奈米尺度下的電化學行為

Development of zone plate based hard-X-ray microscopy and its application for nanoscale in situ imaging of electrochemical process

吳學仁(Syue-Ren Wu)

指導教授 ： 胡宇光 ； 曾繁根

國立清華大學/原子科學院/工程與系統科學系/博士(2013年)

https://doi.org/10.6843/NTHU.2013.00444

摘要

藉由奈米級結構的光學元件的研發，使得硬 X 光顯微術有顯著的發展，尤
其是應用在觀測生物神經元與利用即時觀測去研究電化學現象上。本論文以下分
為三個部分討論。首先，在顯微鏡的研發上我們成功的製作出 20 奈米的菲涅耳
波帶片，並且在經過測試後得到小於 17 奈米的解析度。在目前的硬 X 光領域，
小於 17 奈米是最佳的解析度。
第二部份的研究是關於觀測在奈米尺度下的電化學電鍍所產生的奈米級結
構在電鍍過程中的演化，我們成功的應用硬 X 光顯微鏡偵測到漸進式與瞬時式成
核現象，然而不同的成核機制取決的濃度上的變化。
最後一部分是藉由穿透式 X 光顯微鏡的即時影像討論過電位與微米結構的
模板對銅電鍍的影響。銅晶粒的成長會隨著過電位的增加而變小。而微米結構的
模板在電鍍過程中會限制銅離子的擴散，然後還原出樹枝狀結構的金屬銅。

關鍵字

全視野穿透式硬 X 光顯微鏡 ； 菲涅耳波帶片 ； X 光顯微術 ； 放射學 ； 微斷層攝影

並列摘要

Full field transmission hard X-rays microscopy (TXM) was developed with
nanofabricated optics and applied to neuroimaging and in situ study of
electrochemistry. This thesis consists of three parts. In the first part, the
record-breaking technology development in our research group in fabricating high
performance diffractive optics for hard-x-ray imaging such as Fresnel Zone plate
(FZP), was described in details.. Specifically, we obtained <17 nm image resolution
defined by Rayleigh criteria using these FZPs with an outermost zones of 20 nm FZPs
as an image objectives for >8 keV X-ray photons with rigorous tests.
The second part of this thesis describe the application of the TXM to study a the
nanostructure evolution occurred in the Cu electrodeposition. We presented the 3D
real time in situ microscopy results to characterize the progressive and instantaneous
mode of Cu nucleation processes. We found that the nucleation behavior was driven
by different copper sulfate concentration.
The third part of this thesis reveals the influence of applied overpotential and the
use of microstructured template in the copper electrodeposition. Specifically, when
the overpotential is increased in electrodeposition, the size of copper clusters
generated was smaller than that produced in lower overpotential. Using
microstructured template in the electrodeposition to limit the copper iron diffusion
created dendritic electrodeposits which indicated diffusion limited growth.

並列關鍵字

Full Field Transmission Hard X-rays microscope (TXM) ； Fresnel Zone Plate ； microtomography ； X-ray microscopy ； radiology

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