In today’s nanometer IC (Integrated Circuit) processing, foundries are facing increasing challenges from process limitations that seriously impact the chip yield and reliability. To overcome these limits, numerous design rules are imposed by foundries to be followed in IC design, especially in physical design. Besides design rules, we need to handle some other manufacturing defects, such as wire opens and shorts, for higher chip yield rate. Thus, in this thesis we first introduce two techniques to deal with the process limitations. The first one focuses on handling design rules in maze routing. We propose a shortest path algorithm under nanometer design rules, called MANA. With the algorithm, most rule violations are prevented in maze routing instead of being resolved in post-processing. The second technique is to increase the chip yield by inserting redundant wires to tolerate wire opens. After completing the design routing, usually there are still remaining routing resources that can be used for redundant wire insertion. The proposed insertion algorithm can accurately consider the wire open and short simultaneously and guarantee yield increasing for each insertion. Besides the above two routing innovations, we also introduce a useful technique for routing resources allocation to improve routability. In current SoC (System on Chip), the aspect ratios of blocks in designs may vary much and the required resources in horizontal and vertical directions are different. Thus, we introduce an approach to allocate and consolidate routing resources considering directed routing resource demands, which can greatly increase routability especially for designs with thin areas. The goal for our proposed methods is to achieve high routability and chip yield for nanometer SoC designs.