透過雙質量塊振動系統增加三軸共振式磁力計之磁場感測靈敏度

Sensitivity Improvement of a Resonant 3-Axis Magnetometer Using Dual Mass Vibrating System

龔建緯(Kung, Chien Wei)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2014年)

摘要

在此篇論文中提出了透過雙質量塊的振動系統來設計與實現微機電共振式磁力計，用以提高共振式磁力計之磁場感測靈敏度，相較於傳統以單一質量塊系統作為基本架構的共振式磁力計，雙質量塊系統的設計可以增加系統的動態響應進而增加磁力計的感測靈敏度。透過設計、模擬以及半導體製程實現元件，用以驗證雙質量塊振動系統的效能，本文中所設計的元件透過SOI晶片( Silicon-on-insulation wafer )實現使其製程相對簡單，本篇所設計的雙質量塊振動系統之共振式雙軸磁力計對比於單質量塊振動系統，在感測同平面方向磁場以及出平面方向磁場分別有61%和98%的增益，在磁場解析度方面，同平面方向磁場和出平面方向磁場解析度也都分別增加了3.36倍以及2.91倍。

關鍵字

微機電系統 ； 磁力計 ； 勞倫茲力 ； 雙質量塊振動系統

並列摘要

This study designs and implements the approach to improve the performance of resonant magnetometer using the dual mass vibrating system. As compare with the existing single mass vibrating system, the presented dual mass design could increase the dynamic response and further improve the sensing signal of the magnetometer. In application, the present design has been implemented on the Silicon-on-insulation (SOI) wafer with a relatively simple manufacturing process. The measurements indicate: the sensitivity improvements of the present dual mass design are respectively 61% for in-plane magnetic field and 98% for out-of-plane magnetic field. On the other hand, the resolution improvements of the present dual mass design are respectively 336% for in-plane magnetic field and 291% for out-of-plane magnetic field.

並列關鍵字

MEMS ； Magnetometer ； Lorentz force ； Dual mass vibrating system

參考文獻

[2] J. Lenz and A.S. Edelstein, “Magnetic sensors and their applications,” IEEE Sensors Journal, VOL. 6, pp.631-649, 2006.

[3] E.H. Hall, “On a New Action of the Magnet on Electric Currents,” American Joirnal of Mathematics, VOL. 2, pp.287, 1879.

[4] V. Mosser, S. Contreras, S. Aboulhouda, Ph. Lorenzini, F. Kobbi, J.L. Robert and K. Zekentes, “High sensitivity Hall sensors with low thermal drift using AlGaAs/InGaAs/GaAs heterostructures,” Sens. And Actuators A, VOL. 43, pp.135-140, 1994.

[5] M. Epstein, R.B. Schulz, “Magnetic-field pickup for low-frequency radio-interference measuring sets,” Institute of Radio Engineers Transactions on Electron Devices, VOL. 8, pp.70-77, 1961.

[9] M.N. Baibich, “Giant magnetoresistance of (001)Fe/(001)Cr magnetic superlattices,” Phys. Rev. Lett., VOL. 61, pp.2472-2475, 1988.