軸向氣靜壓磁浮混合軸承系統設計與控制

Design and Control of a Hybrid Magnetic-Aerostatic Thrust Bearing System

陳呂侑(Lu-Yu Chen)

指導教授 ： 范憶華

中原大學/工學院/機械工程研究所/碩士(2020年)

https://doi.org/10.6840/cycu202000671

摘要

由於近年來對於產品的精密度要求不斷提高，使得高精密機械的加工技術需求越來越高，且由於半導體業的發展，對於製程環境也有一定程度的要求，因此乾淨且較無汙染的非接觸式軸承的相關技術越來越受到重視。
本論文主要研究目的整合磁浮軸承與氣浮軸承兩種被廣泛使用的非接觸式軸承，結合兩種非接觸式軸承的優點，製作一套混合式止推軸承系統。在設計上透過氣靜壓軸承提供系統主要負載力，並藉由磁浮軸承搭配控制器對外部干擾的進行主動式控制，以氣靜壓軸承結構為主，配合磁浮軸承來完成穩定軸承的目的。
設計時首先對於軸承的規格進行軸向的分析，計算軸承設計對於剛性與承載力的影響，並藉此決定軸承的規格。決定系統的規格後，便可以建立系統的模型方程式，並且藉由此方程式建立適合的控制器。氣靜壓軸承的方面採用的是軸套式設計，以獲得較佳的穩定性與承載能力，磁浮軸承則是採用兩個電磁鐵以斥力的方式提供氣靜壓軸承軸向的預力，控制器則是採用應用範圍廣泛的PID控制器，以此控制並保持混合式軸承穩定的工作狀態。

關鍵字

軸向混合式軸承 ； 氣靜壓 ； 磁浮 ； PID控制

並列摘要

In recent years, the increasing precision requirements for products have made the demand for high-precision machinery processing technology higher and higher, and due to the development of the semiconductor industry, there are also certain requirements for the process environment, so it is clean and non-polluting non-contact The related technology of bearing is getting more and more attention.
The main research purpose of this paper is to integrate two widely used non-contact bearings, magnetic bearing and air bearing, and combine the advantages of two non-contact bearings to make a hybrid thrust bearing system. In the design, the main load of the system is provided through the hydrostatic bearing, and the external interference is actively controlled by the magnetic bearing and the controller. The main structure is the pneumatic bearing, and the magnetic bearing is used to complete the purpose of stabilizing the bearing.
During the design, the axial specification of the bearing is first analyzed, and the influence of the bearing design on the rigidity and bearing capacity is calculated, and the bearing specification is determined accordingly. After deciding the specifications of the system, a model equation of the system can be established, and a suitable controller can be established by this equation. For the hydrostatic bearing, the sleeve design is used to obtain better stability and load-bearing capacity. For the magnetic bearing, two electromagnets are used to provide the axial preload of the hydrostatic bearing in a repulsive manner. The controller uses a PID controller with a wide range of applications to control and maintain the stable working state of the hybrid bearing.

並列關鍵字

an axial hybrid system ； aerostatic bearing ； magnetic bearing ； PID controller

參考文獻

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