摘要
本技術報告內容是探討面板顯示器產業製程中所使用的雷射液晶顯示器之短路環切割機之控制設計以及系統架構之整合。研究內容主要包括分析二軸直線補間在微觀下的直線度不穩定因素，利用短時間密集取樣數據得到移動量命令值與實際值的誤差量，並求出使直線度穩定的方法；找尋最佳切割之切割寬度與高度，可利用雷射出光焦距與雷射輸出功率之關係，經測試各種不同高度的切割效果來決定最佳切割的Z軸高度範圍值。 分析過程中控制雷射組Z軸高度在區間範圍內做多量各種不同高度的切割找出設備實際最佳切割的Z軸高度範圍值，雷射輸出功率的研究實驗方法亦同；而在切割後立即以自動光學檢測來檢驗切割的品質並且研究探討如何將取像更清晰與對比分明以及判別方法趨於單純使系統更穩定，經實驗測試驗證所開發之系統可達成雷射切割速度為300mm/sec、切割寬度為40±10µm與精度為W=40±10µm，A.B=20±5µm，符合精密專用自動光學檢測設備之使用規範。
並列摘要
Control design of A LCD Laser short-ring cut machine as well as system integration for the fabrication of flat panel display is investigated in this technical report. The main research topics include the analysis of microcosmic instability of cutting straightness on a straight line provided by two-axis linear motion and the collection of enough amount of intensive sampling data of error between the desired and actual values in very short time and in search of the stable method for straightness. The search of optimal cutting width and altitude by means of various adjustment of the focus of a laser beam and its power output is carried out. Numerous testing of changing altitude of the Z-axis which affects the focus of laser beam and of changing the laser power output are carried out to analyze for optimal operating conditions. Verification of cutting quality by using automated optical inspection device and investigation of how to get a clearer image with high contrast as well as how to make the system more stable are embarked on. Via experimental testing, the developed system is able to reach the target of laser cutting speed 300mm/sec, cutting width is 40±10μm, and accuracy of W=40±10µm, A.B=20±5µm suitable for the requirement of high-precision Automated Optical Inspection (AOI) equipment.