- 學位論文
直流脈衝電源控制器SPIK1000A/2000A之控制板分析
Control Boards Analysis of DC-Pulse Controller SPIK1000A/2000A
摘要
本論文主要目的在建立應用於交直流電漿之直流脈衝電源控制器之技術資料。直流脈衝電源控制器具有六種輸出電壓模式與快速之電弧(ARC)偵測，此六種模式包含正/負直流電壓模式、單極性正/負脈衝電壓模式與對稱式/非對稱式雙極性電壓模式，且每一模式之輸出電壓可被設定在0V~+/-1000V之範圍內，而輸出頻率則可任意調整在0~50KHz內。此直流脈衝電源控制器可分為SPIK1000A與SPIK2000A二機種，其主要之控制核心分別為可程式邏輯IC GAL及相關數位電路與德州儀器(TI)之TMS320F240晶片。直流脈衝電源控制器，主要電路架構為二組由IGBT元件所構成之全橋式轉換電路，其中藉由每一組電路之六種切換條件以產生六種電壓模式輸出，且利用此二組電路交替地切換以提高輸出脈波頻率，最高頻率可達50KHz，並可利用個人電腦上Visual Basic人機介面軟體或以8051微處理器為基礎之人機介面(Front Panel)，對直流脈衝電源控制器進行控制。
並列摘要
The purpose of this thesis is to build up the detail technical data of a DC-Pulse Power Controller, which has six output voltage modes and quick arc detection function for AC and DC plasma applications. The output voltage modes contain positive/negative DC, positive/negative unipolar and symmetrical/asymmetrical bipolar voltage modes. Moreover, the output voltage can be set in the range of 0V to +/- 1000V for each mode and the output frequency can be adjusted freely between 0 Hz and 50 kHz. There are two models of DC-Pulse Power Controller, SPIK1000A and SPIK2000A. The main controller of SPIK1000A is programmed logic IC GAL with digital circuits and the main controller of SPIK2000A is TI TMS320F240 DSP. Furthermore, the main power circuit of the DC-Pulse Power Controller is two full-bridge converters using IGBT switching components. Six switching conditions are implemented at each full-bridge converter to generate six output voltage modes. In addition, the output frequency of pulse can be increased to 50 kHz by alternatively switching of the two full-bridge converters. Finally, Visual Basic in pc and 8051 microprocessor have been developed as two alternatives for the man/machine interface of the DC-Pulse Power Controller.