六軸微動平台之靜態誤差探討

Investigation on the Static Error of 6-DOF Micro-positioning Platform

莊錦煌(Chin-Huang Chuang)

指導教授 ： 丁鏞

中原大學/工學院/機械工程研究所/碩士(2004年)

https://doi.org/10.6840/cycu200400751

摘要

本文重點為設計製作壓電驅動式之六軸微定位平台，並對該平台探討其靜態誤差補償方法。由實驗量取每軸之電壓-位移對應關係。配合三點三軸量測法之設計，取得平台姿態之參數輸出。比較藉由六軸微動平台逆向運動學計算之量測值與計算值，可得誤差補償模型，亦可估算誤差補償模型之精度。

關鍵字

六軸微動平台 ； 三點三軸量測法 ； 靜態誤差補償

並列摘要

Design of a sex-DOF micro-positioning platform and the static error compensation method for the platform is studied. Experiment is carried on the measurement of displacement with respect to the applied voltage for each axis. A 3-points-3-axes method is designed to measure the pose of the workspace. In comparison the measured data with the computed value based on the inverse kinematics of the 6-DOF platform, error compensation model is thus obtained. The tolerance of the error compensation model is also investigated.

並列關鍵字

static error compensa ； 6-DOF micro-positioning platform ； 3-points-3-axes measuring method

參考文獻

[1] Ralph C Merkle, “A new family of six degrees of freedom positional devices,” Nanotechnology, vol. 8, pp. 47-52, 1997.

[2] Pernette Eric, Henein Simon, Magnani Ivo, Clavel Reymond, “Design of parallel robots in microrobotics,” Robotica, vol. 15, no. 4, pp.417-420, July-Aug., 1997.

[3] S.H. Chang and S.S. Li,”A high resolution long travel friction drive micro positioner with programmable step size”, Rev. Sci. Instruments, PP. 2776-2782, 1999.

[5] Ryu Jae W., Lee Sung-Q, Gweon Dae-Gab,Moon Kee S, “Inverse kinematic modeling of a coupled flexure hinge mechanism,” Mechatronics, vol. 9, no. 6, pp. 657-674, 1999.

[8] H. Mizumoto, K. Nomura, T. Matsubara, and T. Shimizu “An ultraprecision positioning system using a twist-roller friction drive,” J. of ASPE, vol. 15, pp. 180-184, 1993.