以液體間接加熱之溫度控制

A Study of Temperature Control with Indirect Liquid Heating

邱漢得(Han-Te Chiu)

指導教授 ： 許政行

中原大學/工學院/機械工程研究所/碩士(2006年)

https://doi.org/10.6840/cycu200600044

摘要

摘要
本論文的目的是達成均溫板的均溫控制效果，進而達到實用面積表面溫度具有均勻溫度變化之目的。本研究可直接應用於半導體氧化製程之加熱盤、印刷電路基材板壓合製程中之熱盤；也可加以改變用於粉末射出成形機，微射出成形機用之模具溫度控制等。
在許多需求均溫製程中，均溫板大多採用多點式PID模式控制，易造成參數設定困難及極均溫效果不佳。近年來部分研究利用單一液相或氣相使均溫板維持均溫。本文利用液氣共存雙相區域讓熱盤的受熱系統能維持一個固定溫度，如此便可以最簡單之單點PID溫度控制器，輕易達到變異值較小之均溫控制效果。
實驗結果顯示，就均溫效果而言，本文所得最佳均溫變異值為±0.5℃，優於其他現存之研究。
系統鑑別部分可找出相似系統高達 96.46% 的轉移函數。

關鍵字

PID控制 ； 均溫 ； 利用液相或氣相使均溫板維持均溫 ； 系統鑑別 ； 均溫板

並列摘要

Abstract
The purpose of this thesis is to reach homogeneous temperature control effect on the heat plate. The research can be applied directly to the semi-conductor oxidation processing equipment and the compression manufacturing process of PCB laminates. It can also be modified to use on the temperature control of powder injection molding (PIM) and micro-injection molding, etc.
Up to now, most manufacturing processes with homogeneous temperature control requirement use multiple-points PID control. The common difficulties encountered are the set-up of control parameters and the effectiveness of homogeneous temperature. Recent researches tried to maintain homogeneous temperature control of heat plate by a single phase, either liquid or gas. In this research, the heat plate is kept at the state of dual-phases, i. e., the state of phase change between liquid and gas, so that together with a single-point PID temperature controller only, the homogeneous temperature condition can easily be achieved with a smaller range of variation.
The experimental results show that, as far as the homogeneous temperature is concerned, the best result we got for the temperature variation is ±0.5℃, which is superior to other researches.
The system identification can discover the similar system to reach as high as 96.46% transfer function.

並列關鍵字

PID Control ； system identification

參考文獻

[12] 曾建銘，以液態氣態間之相變化達均溫控制功能，私立中原大學電機工程學研究所，

[1] Weng Khuen Ho, Chang Chieh Hang and Lisheng S.

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　　and Gain and Phase Margins of Well-Known PID Tuning