矽表面官能化與接枝聚亞醯胺研究

Surface functionalization and polyimide-grafting on silicon

陳世浚(Shih-Chun Chen)

指導教授 ： 劉英麟

中原大學/工學院/化學工程研究所/碩士(2007年)

https://doi.org/10.6840/cycu200700100

摘要

摘要
本研究以新穎方式對矽晶圓表面改質，反應步驟簡單且具有化學多樣性。首先以氯化亞錫為催化劑，將Glycidyl phenyl ether（GPE）與矽晶圓表面之Si-OH官能基反應鍵結，在矽晶圓表面形成有機單分子層，然後經由有機化學反應使末端帶有胺基，以縮合聚合方式在晶圓表面接枝聚醯胺以及聚亞醯胺，並分別以X-射線光電子光譜分析儀與原子力顯微鏡鑑定晶圓表面之化學結構以及型態。研究結果顯示，以這樣的方式成功在矽晶圓表面接枝聚醯胺以及聚亞醯胺。

關鍵字

聚亞醯胺 ； 矽晶圓 ； 接枝

並列摘要

Abstract
In this study, a novel modification method on silicon wafer surface was developed. This method shows advantages of simple and easy treatments and chemical versatility. The procedure of this method are incorporation of GPE monomer to silicon wafer surface by ring-opening reaction, chemical functionalization of amino groups on the GPE moieties, and grafting polyamides and polyimides chains onto silicon surfaces.
The chemical composition and surface topography of the wafer surface after modification were determined by X-ray photoelectron spectroscopy (XPS) and atom force microscopy (AFM).

並列關鍵字

grafting ； polyimide ； silicon wafer

參考文獻

3. T. Bogert, R. R. Renshaw, J. Am. Chem. Soc., 30, 1135, (1908)

5. J. F. Heacock, C. E. Barr, SPE Trams, 105 (1965)

9. R. Boukherroub, D. D. M. Wayner, J. Am. Chem. Soc., 121, 11513, (1999)

13. W. H. Yu, E. T. Kang, K. G. Neoh, J. Phys. Chem. B , 107, 10198, (2003)

16. F. J. Xu, S. P. Zhong, L. Y. L. Yung, E. T. Kang, K. G. Neoh, Biomacromolecules, 5, 2392, (2004)