- 學位論文
滾輪式壓印技術應用於全晶圓發光二極體製程開發
Process Study of the Roller Imprinting Technology Applied to the Full Wafer Light-Emitting Diodes
摘要
在綠色能源的推動下，發光二極體已然成為未來新世代的照明光源。然而在節能的考量下，如何達到製程快速、提升產能的目標，又能在相同的能量供應下得到最大的出光效率，便是本篇論文主要的目的。 因此本研究發展滾輪式奈米壓印技術，自行開發設計紫外光滾輪式奈米壓印設備，製作微米及奈米級結構於發光二極體晶片上，藉此提升發光二極體的光萃取效率。利用已開發完成的紫外光滾輪壓印設備進行初步壓印實驗，對轉印後的圖形進行觀察，推斷產生缺陷現象的可能原因，並討論各項壓印製程參數對於壓印材料的影響。主要的製程參數有壓印壓力、壓印速度、壓印間隙，藉由觀察初步實驗結果，進行參數探討與製程改善。最後成功壓印多種不同微/奈米結構於全晶圓發光二極體晶片後，量測表面具有微/奈米結構之發光二極體晶片的電特性及光特性。依據所製作的各式結構，微米部分有8.65 %、17.84 %、15.34 %、22.07 %(hole, inverted pyramid, cone, cylinder)，奈米方面則有18.06 %、19.23 %(nano-cone, nano-cylinder)的發光效率提升。而製程之後發光二極體在電流20 mA的順向電壓依舊維持3.03 V，證明電特性並未因此而受到影響。
並列摘要
LED (Light Emitting Diode, LED) has become the next generation of lighting under the drive of green energy. In order to save more energy, how to increase the throughput and meanwhile enhance the light efficiency are the major issues of this thesis. UV roller nanoimprinting equipment and technology were developed in this study to fabricate micro/nano structures on the surface of LED to enhance its light extraction efficiency. Imprinting experiments investigated the influences to the imprinting defects of imprinting material SU-8, and it concludes that imprinting pressure, imprinting speed and the gap between roller and substrate are the main experimental parameters to influence the imprinting quality. After testing of these parameters, a variety of micro/nano structures were built successfully on the surface of the full-wafer LED. The electrical and optical characteristics were also measured. The results showed that forward voltages were kept around 3.03 Volts under 20 mA current injections, which means the electrical characteristics were not damaged after chip process. However, the optical efficiencies increase 8.65%, 17.84%, 15.34%, 22.07%, 18.06% and 19.23% for micro-hole, micro inverted pyramid, micro-cone, micro-cylinder, nano-cone and nano-cylinder LEDs respectively.