離子高分子金屬複合材料之微幫浦組裝
及其電致動現象模擬

本研究目的是利用微影製程組裝IPMC微幫浦，建立IPMC模型並以有限元素法模擬IPMC的電致動性質。實驗分為四部分：(1)製備IPMC薄膜，包含不同厚度黃金與白金電極層，(2)量測IPMC薄膜的基本性質：包括厚度，含水量，表面電阻值，機械強度，電致動性能，(3)建立IPMC薄膜的數學模型，使用有限元素法模擬IPMC之電致動性質，並與實際電致動結果比較，(4)利用微機電製程組裝IPMC微幫浦並進行實際測試，評估幫浦致動問題與改良。在基本性質量測結果方面，經過三次表面電極製備後，表面電阻值均可降至10 歐姆以下，IPMC最大含水量約在19-20 %，且IPMC含水量與應變為線性關係。在店致動性能測試中，不論以交流或直流驅動IPMC，位移量均隨著電壓增加而增加，且在潮濕或水溶液的環境中有較佳的致動性質。在0.1 N NaOH環境下有最佳的致動位移量為4.38 公厘。而使用PDMS以三明治方式將IPMC固定後，在潮濕情況下以交流3V致動，黃金電極之IPMC位移量下降61.5 %，白金電極的IPMC位移下降28.5 %。在模擬分析的部分，使用擴散定律、高斯定律、虎克定律來建立IPMC模型，模擬IPMC薄膜之電致動表現。以懸臂樑方式進行模擬，在交流電壓為3 V，頻率3 Hz下，模擬位移量為實際位移量的0.7倍，這是因為IPMC模型在電場強度對力量影響的部分建立不完全。最後在IPMC微幫浦組裝上，將IPMC致動器與微流道結合，在交流電壓為5 V，頻率2 Hz下可成功致動IPMC微幫浦。本研究可顯見IPMC在微幫浦應用之潛力，未來若能將IPMC微幫浦問題作進一步的設計與改良，以應用於植入式的藥物釋放系統。

關鍵字

有限元素分析；電致動；植入式藥物釋放系統；微影技術；離子高分子金屬複合材料

並列摘要

The purpose of this study is to utilize lithography technology to fabricate ionic polymer-metal composites (IPMC) microfluidic pump. In addition, a finite element analysis program, i.e. COMSOL Multiphysics 3.5, was used to stimulate the electroactive deformation of IPMC membrane. The experiment was divided into four parts. First, IPMC membrane having different thickness and Pt/Au electrodes were prepared. Second, physical properties of IPMC membrane; the moisture content, the surface resistance and Young’s modulus were measured. Third, a computational model of IPMC membrane was established to evaluate the electroactive performance. The model considered the Fick’s law of ions and water molecules in IPMC membrane, Gaussian’s Law and generlized Hook’s law. Lastly, the IPMC membrane placed above a microfluidic chamber. In the electroless plating of IPMC membrane, an optimal surface resistance of 10 ohm could be reached after at least three cycles of the plating using gold complex salt. The maximum moisture content of IPMC membrane was about 19 to 20 %, and the moisture content and strain was linearly dependent. It was found that the optimal bending displacement of IPMC membrane was obtained in the following condition: wet, 0.1 N NaOH solution. Furthermore, a better displacement can be reached 4.38 mm when the membrane was soaked in o.1 N NaOH solution. The maximum displacements of Au electroded IPMC decreased about 61.5 % after sandwiched IPMC with PDMS membranes. In contrast, that of PDMS-laminated Pt-IPMC decreased to 28.5 % of original one. In the computational model, the IPMC cantilever beam electrically activated under a sine waveform of 3 Volt and 3 Hz showed a 0.7 fold of that of measured displacement. Finally, fabricated IPMC microfluidic pump was able to deliver deionized water under a driving condition of 5 volt and 2 Hz. However, the drawback of the pump was difficult fixed lead fluid leakage easily. This study has demonstrated a potential application of IPMC membrane in the microfluidic pump. It is expected that the performance of the IPMC microfluidic pump could be improved if the drwabacks are addressed, yet the IPMC micropumps are highly applicable to the implantable drug delivery system.

並列關鍵字

finite element analysis ； Lithography technology ； actuator ； Ionic polymer- metal composites (IPMC)

參考文獻

[47] 徐名成，電梳驅動定量微幫浦之設計，中原大學機械工程學系，碩士論文，民國95年。

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離子高分子金屬複合材料之微幫浦組裝及其電致動現象模擬

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