隨著目前工業產品的微型化,產品組件的大小必須更加微型化和精密,但是傳統之三軸工具機無法達到所要求的精度,為了提昇傳統三軸工具機精度之目的,發展精度達到微米/奈米級的移動平台將更加重要。因此本文提出了使用縮放儀機構原理來設計一台二維之微型移動平台。 在傳統的工具機上,控制方法和驅動系統的發展已經逐漸成熟,所以本文考慮設計以傳統 XY平台去推動一個以縮放儀機構所形成的微型平台。傳統的XY平台並不需要高精度,而藉由所設計之縮放儀機構來使微型平台可以實現微觀尺度的精度,而達到可使用傳統的運動控制器來控制微型移動平台之目的。為了提高定位精度,我們可以調整縮放儀機構的比例來得到微型工具機所需的精度。從理論和實驗結果來證明,本文所設計之縮放儀微型平台可達到縮小誤差,而達到提昇精度之目的。
According to the miniaturization of industrial products, the component size of these products must be more miniaturized and precision then the products. However, the traditional three-axis machine tools can not achieve the required accuracy, in order to enhance the traditional three-axis machine tool accuracy purposes. Therefore, to develop a micro- even a nano-level X-Y table will be more important. Thus, we proposed a pantograph based micro platform in this paper. The control and driving systems are well development in the traditional machining machines, so we consider to design a pantograph mechanism to form a micro platform which driven by the traditional X-Y table. The X-Y table does not need high-precision, through our mechanism design the target platform can be achieved micro-scale precision. Thus, we can use the traditional motion controller to control the Micro Platform. For enhancing positioning accuracy, we can adjust the pantograph ratio of the micro platform to get a desired precision. From the theoretical and simulating results showed that the proposed method in this paper is feasible to develop micro platform which can achieve the micro-level precision. And a micro platform with the target X-Y are built up to test and verify the proposed mechanism.