微機電扭力振盪器的非線性振動之研究

A Study of Nonlinear Vibration of a Microelectromechanical Torsional Oscillator

吳添偉(Tian-Wei Wu)

指導教授 ： 施延欣

中原大學/工學院/機械工程研究所/碩士(2010年)

https://doi.org/10.6840/cycu201101113

摘要

考慮受二固定極板之靜電影響，且其二端由蛇型彈簧支撐的平板的振動分析。此系統在激發電壓較低時，是一個容易觀察的線性阻尼振盪器。非線性現象則完全由檢測電極及驅動電極造成，其特性可由檢測電極及驅動電極改變之。本文在此系統的頻率響應，其共振關係使用四階Runge-Kutta的方法來描述振動對時間的關係，此為本研究主要的貢獻。

關鍵字

微機電系統 ； 非線性 ； 諧振器

並列摘要

The vibration of a plate under two fixed electrostatic electrodes with being supported by two serpentine springs are considered. When the system in the low excitation voltage , the system is an easy observation of the linear damping oscillator. The nonlinearities can be tuned by modifying the voltages. Frequency response of the system in this study, the relationship between period and time are determined by using the 4th Runge-Kutta method.

並列關鍵字

resonator ； MEMS ； nonlineari

參考文獻

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