摘 要 目前工業發展趨勢逐漸往微型化發展,工件尺寸需更加精密與微型化,本論文根據縮放儀機構原理設計一奈米微動平台,將微米/奈米級精度之移動平台與傳統工具機結合,達到提昇傳統三軸工具機之精度為主要目的。 在傳統之工具機發展上,控制法則與驅動系統已經逐漸成熟,因此本文在設計上以傳統 XY平台結合一個微動平台做設計考量。傳統之XY平台精度不需太高,而藉由所設計之縮放儀機構,可使微型平台實現微觀尺度的精度,而達到使用傳統運動控制器來控制微型移動平台之目的。 針對縮放儀桿件做模擬,分析桿件材料之壓應力,利用模擬結果做出正確之選購及設計,並減少桿件與桿件間之摩擦力,增加微動平台之精密度。因此若將此設計結構加以應用於微型化精度之加工,將可節省成本之開銷以及提高加工精度,達到低成本微型化產品之目的。
Abstract Due to the industry gradually have developed to miniaturization, the workpiece size need to reach the micro level and have higher precision. According to micro platform based on the pantograph, this paper designed a micro-dynamic platform to achieve micron-scale and nanometer-scale precision, and combined the micro platform and traditional three axis tools machine to raise the precision of traditional machine tools. In development of the traditional machine tools, the control rules and driving system have grown. Therefore, this paper used traditional XY platform combined with a micro platform. The precision of traditional XY platform is not getting micron-scale and nanometer-scale precision. Through the design of pantograph, the micro-scale instrument platform could achieve the accuracy of micro-scale, and the traditional motion controller could be used to control the micro-dynamic platform. Final, simulated the rods of pantograph to analyze the compression stress of rods. Make the correct selection and design by the simulation results and reduced friction of each rod to increase the precision of micro-dynamic platform. Therefore, apply the designed pantograph to the micron-scale and nanometer-scale precision of manufacture could save cost and raise precision to achieve the purposes of this paper.