本文目標是設計開發一種能同時產生高頻振動及微小電能之壓電元件系統,並導入於需要使用振動及電能之產業應用,測試其功能並發展該應用設備之雛型。此新型壓電元件主要是結合兩件壓電陶瓷振動子配合周邊機構完成,將輸入電能於第一個壓電陶瓷振動子利用逆壓電效應原理轉換為高頻振動輸出,銜接於後之第二個壓電陶瓷振動子利用正壓電效應原理將輸入振動機械能轉換為電能,此新型壓電元件係一體設計可以同時提供兩種能量及性能輸出,其系統結構設計更為簡單且經濟。研究內容主要包括新型壓電元件之系統設計分析及系統雛型測試、微機構設計、應用系統平台建立與性能測試。本研究是以超音波振盪輔助微放電加工為應用範例,完成數模建立與分析,模擬驗證系統之可行性及功能性,並實驗驗證其效果可達預期目標。
The primary goals of this project are the design of a piezoelectric-driven system able to produce both high-frequency vibration and low electric power and implementation to the selected application fields, as well as function testing and evaluation. This proposed piezoelectric-driven device mainly consists of two pieces of ceramics actuators. With power input to the first actuator to oscillate, the connected second one makes use of the transmitted mechanical vibration energy to generate electricity. The research topics include the system analysis and design, implementation on the prototyped application apparatus, piezoelectric ceramic actuator design, micro structure fabrication, system testing and evaluation. In this study, a prototype of ultrasonic micro electric discharge machining (U micro-EDM) is built to investigate its function. Through performance testing and evaluation the proposed system can achieve the target.