薄膜電晶體液晶顯示器彩色濾光片光阻塗佈起始膜厚穩定性製程參數最適化研究

Recipe Modification for Uniformity of Start Coating Thickness in TFT LCD Color Filter Photoresist

林宏益(Hung-Yi Lin)

指導教授 ： 章明

中原大學/工學院/機械工程研究所/碩士(2014年)

https://doi.org/10.6840/cycu201400480

摘要

薄膜電晶體液晶顯示器彩色濾光片彩色顏料(RGB)在塗佈技術不佳狀況下,巨觀上會出現色差，造成面板良率下降與成本增加，為了改善此問題，本研究針對塗佈膜厚製程參數技術進行研究，探討如何抑制彩色濾光片光阻於塗佈起始膜厚之不穩定現象，以預防大量不良面板之發生。
本研究係運用六標準差專案手法的流程步驟-DMAIC，進行膜厚製程條件與參數改善。首先找出關鍵品質特性值(Define)，衡量量測系統之準確性(Measure)，歸納出影響製程的關鍵因子，再利用實驗設計的方法進行實驗測試，找出最佳的製程參數組合(Analyze)，進行最佳參數製程能力的驗證，以降低製程不良率 (Improve)，並將最佳參數標準化列為管制項目(Control)。實驗結果顯示以DMAIC六標準差專案管理的流程進行製程改善，不僅在彩色濾光片的關鍵製程上有明顯效益，且最佳條件組合能達降低不良率、提升品質和製程能力之效，使製程更為穩定。
由實驗設計法DOE可得到以下結論:
1.塗佈起始高度:塗佈起始越高越好，但高度太高會有破膜問題
2.塗佈幫浦再填充速率: 塗佈幫浦再填充光阻速度越快越好，但太快會有氣泡問題
3.幫浦特性:PT 幫浦較CT 幫浦佳
4.光阻黏度:光阻黏度越稀越好，光阻塗佈後延伸性較佳
依照上述四個主要影響膜厚變異參數，再配合起始膜厚由薄變厚方式，由生產線之量產品驗證Cell色差不良率，經連續三周投入小/中/大量共1360大片(共8160 小片)，其彩色濾光片(CF)色差不良率平均降至0.01%，顯示已見明顯成效。

關鍵字

光阻塗佈 ； 起始膜厚 ； 六標準差 ； 彩色濾光片

並列摘要

Color filter of TFT- LCD display on RGB Layer has abnormal coating , it can easy redue to color shift issue ( Macro review status ). This issue caused panel yield loss and cost increased. For this issue, we study how to improve the uniformity of start coating thickness directed the coating recipe or the other reasons . To prevent the panel has yield loss of occurred.
In this study, making use of six standard deviation procedures-DMAIC (Define, Measure, Analyze, Improve and Control), improve the uniformity of start coating thickness. First find key quality characteristics value (Define), measure measuring system of accuracy (Measure), Finding effects business drive of key factor, then using experiment design of method for experiment test, find best of business drive participation number combination (Analyze), Test the best effections of factor, to improve the product’s Yield (Improve). Than build up the S.O.P. to control the critical recipe (Control). Experimental results show six standard deviations tool in DMAIC project management process for process improvement, not only in CF key process has clear benefit, and the best conditions can reduce the combination of malnutrition, to improve quality and efficiency of process capability, making the process more stable. 　　
By DOE experiment can get following conclusions：
1.Coating start gap： coating start gap is higher the better, but gap too high will has poor coating problem .
2.Pump recharge speed：pump recharge speed the faster the better, but too fast will has bubble problem .
3.Pump characteristics： PT pump is better than CT pump .
4.Resister viscosity： Resister viscosity is so dilute so good,The ductility is better.
In accordance with the four major parameters that influence the thickness variation, combined with Start uniformity thickened by a thin, For Cell yield check, we input small/medium/large lot total 1360 sheet (8160 Chips), the CF color shift ratio less than 0.01%, shows gat significant results.

並列關鍵字

color filter ； photoresist coating ； coating start ； the six standard deviations

參考文獻

[1] 王信陽，”彩色濾光片的發展技術藍圖”，光連雙月刊第45期.2003年05月。

[14] 王信陽，“彩色濾光片的發展技術藍圖“

[5] Forrest W Breygogle(1999)

[16] Tom Dasgupta., 2003, “Using the six-sigma metric to measure and improve the

[2] Shih-Chang Huang, “我國TFT-LCD產業之技術優勢分析”，國立清華大學科技管理系，2006年12月19日。