- 學位論文
熱退火處理奈米金薄膜之表面形貌及特徵維度分析
Morphology and Characteristic Dimensions of Thermal Annealing Nano Gold Film Surfaces
摘要
本研究以圖形分析中常用的HHCF (Height–Height Correlation Function)及IDF(Interfacial differential function)分析金薄膜之表面相關參數，其中運用到三種不同的模型圖樣，改變其排列、高度、旋轉角度以及利用不同半徑的圓形隨意排列四種方式來證實IDF擬合結果比HHCF擬合結果更快速且有效。 在實際的運用中是以熱蒸鍍法製備不同厚度的金薄膜(5nm、20nm、50nm)於石英基板，在不同溫度下熱退火(anneal)及改變熱退火氣氛(Ar、N2、O2)的環境，探討其金薄膜的表面形貌變化、粗糙度以及奈米金島狀(nAuI)分離的平均距離和平均顆粒大小。以原子力顯微鏡(AFM)及掃描式電子顯微鏡(SEM)兩組互相參照進行表面形貌的分析，利用上述結果可知其表面依溫度提升而呈現出金薄膜、微孔洞、碎形結構、nAuI和nAuI趨近六角形的樣貌，利用AFM圖像由軟體imageJ估算nAuI之間的平均距離和平均大小，再與IDF及HHCF兩種擬合結果互相比較，HHCF擬合結果顯示因相關長度在大尺度下會有震盪產生，因此造成擬合結果的誤差，但由IDF擬合之結果誤差不大，其原因為IDF擬合方式不會產生震盪且不受nAuI高低起伏不同及排列之影響。因此IDF擬合結果相較HHCF擬合結果是更快速且有效的。
並列摘要
In this research, the morphology analysis of gold film surface was conducted by using the Height–Height Correlation function (HHCF) and Interfacial Differential Function (IDF) with the Atomic Force Microscopy (AFM) image data. The analysis extracts the characteristic dimensions from the mounded surfaces such as grain sizes or intergrain lengths, which are important in statistical analysis. We confirmed that the IDF method is more quick and efficient to determine the characteristic lengths than the HHCF one, by testing a series of mounded surface patterns of which the characteristic dimensions are various and well–known. We also prepared real surface samples by annealing the evaporated different thicknesses gold films (5nm,20nm and 50nm) on quartz substrates under different temperatures and gas environments (Ar, N2 and O2). With the help of the AFM and Scanning Electron Microscopy (SEM) measurements, the gold film surface morphology, the averageseparation distance and the size of the gold nano Au island (nAuI) were explored. By using the software imageJ we estimated theaverage distance and the average size of nAuI, and then compared the fitting results from the two above methods. It shows that the analysis of the HHCF curve is less clear in mounded surfaces. The errors may be caused by the curve oscillations expected at large length scale. However, the analysis of the IDF was not affected by the arrangement and the height of nAuI.